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Wang Minggang

Chinese Academy of Sciences

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Publication

Featured researches published by Wang Minggang.

Science China-technological Sciences | 2011

Formation mechanism of subtrenches on cone-shaped patterned sapphire substrate

Yang Wei-feng; Zhang QingZhao; Wang Minggang; Xia Yang

Archive | 2013

Preparation method of light-emitting porous silicon

Liu Bangwu; Xia Yang; Liu Jie; Li Chaobo; Li Yongtao; Wang Wendong; Wang Minggang

Archive | 2013

Ion implantation dose detection control apparatus of plasma immersion ion implanter

Wang Minggang; Liu Jie; Xia Yang; Li Chaobo; Chen Yao; Zhao Lili; Li Yongtao

Archive | 2013

Dose detection device used for plasma immersion injection

Li Chaobo; Wang Minggang; Qu Furong; Xia Yang

Archive | 2013

Method for uniformly injecting ions into substrate

Liu Jie; Wang Minggang; Xia Yang; Li Chaobo; Luo Wei; Luo Xiaochen; Li Yongtao

Archive | 2013

Electrode of plasma etcher for carrying out dry etching on hard inorganic material substrate

Ping Zhihan; Su Jinghong; Huang Chengqiang; Wang Minggang; Chen Bo; Li Chaobo

Archive | 2013

Method for controlling junction implantation depth

Li Chaobo; Wang Minggang; Xia Yang

Archive | 2013

Plasma immersion ion implantation (PIII) technological process control and on-line detection device of dose and evenness

Wang Minggang; Li Chaobo; Qu Furong; Xia Yang

Archive | 2013

Method of controlling distribution gradient of filled elements in soaking and filling of plasm

Wang Minggang; Li Chaobo; Xia Yang

Archive | 2012

POROUS SUBSTRATE AND MANUFACTURING METHOD THEREOF

Xia Yang; Liu Bangwu; Li Chaobo; Liu Jie; Wang Minggang; Li Yongtao

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Collaboration

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Xia Yang

Chinese Academy of Sciences

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Li Chaobo

Chinese Academy of Sciences

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Liu Bangwu

Chinese Academy of Sciences

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Yang Wei-feng

Chinese Academy of Sciences

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Chen Bo

Chinese Academy of Sciences

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Huang Chengqiang

Chinese Academy of Sciences

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Luo Wei

Chinese Academy of Sciences

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Zhang QingZhao

Chinese Academy of Sciences

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