Wenguang Zhang

Method for preparing a shallow trench isolation structure with the stress of its isolation oxide being tuned by ion implantation

Method for reducing shallow trench isolation defects

Manufacturing method of metal copper Damascus interconnection structure

Pretreatment method for SiGe selective epitaxial growth

Method for implementing high-performance metal-oxide-metal by using ultra-low dielectric constant thin film

Chemically mechanical polishing method of ultra-low dielectric material

Method for improving tensile stress of silicon nitride film in semiconductor devices

Novel method for silicon carbide film preparation capable of avoiding light resistance poisoning

Treatment method for low-temperature silicon dioxide

Production method of shallow trench isolation structure with polycrystalline sacrifice liner layer