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Wenguang Zhang

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Publication

Featured researches published by Wenguang Zhang.

Archive | 2011

Method for preparing a shallow trench isolation structure with the stress of its isolation oxide being tuned by ion implantation

Chunsheng Zheng; Wenguang Zhang; Qiang Xu; Yuwen Chen

Archive | 2012

Method for reducing shallow trench isolation defects

Qiang Xu; Wenguang Zhang; Yuwen Chen; Chunsheng Zheng

Archive | 2012

Manufacturing method of metal copper Damascus interconnection structure

Chunsheng Zheng; Wenguang Zhang; Qiang Xu; Yuwen Chen

Archive | 2012

Pretreatment method for SiGe selective epitaxial growth

Wenguang Zhang; Chunsheng Zheng; Qiang Xu; Yuwen Chen

Archive | 2012

Method for implementing high-performance metal-oxide-metal by using ultra-low dielectric constant thin film

Youcun Hu; Qiang Xu; Wenguang Zhang; Chunsheng Zheng; Yuwen Chen

Archive | 2012

Chemically mechanical polishing method of ultra-low dielectric material

Wenguang Zhang; Qiang Xu; Chunsheng Zheng; Yuwen Chen

Archive | 2012

Method for improving tensile stress of silicon nitride film in semiconductor devices

Qiang Xu; Wenguang Zhang; Chunsheng Zheng; Yuwen Chen

Archive | 2012

Novel method for silicon carbide film preparation capable of avoiding light resistance poisoning

Wenguang Zhang; Qiang Xu; Chunsheng Zheng; Yuwen Chen

Archive | 2012

Treatment method for low-temperature silicon dioxide

Qiang Xu; Wenguang Zhang; Chunsheng Zheng; Yuwen Chen

Archive | 2012

Production method of shallow trench isolation structure with polycrystalline sacrifice liner layer

Chunsheng Zheng; Wenguang Zhang; Qiang Xu; Yuwen Chen

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Collaboration

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