Wenguo Yang

Development of research on super-precision measurement techniques for circle and cylindrical contour

At the beginning, it is presented that several theoretical and key technique problems among super-precision and nanometer measurement for circle and cylindrical contour, including: periodic reappearance of straight line datum movement; harmonic suppression in the measurement for circle contour; datum errors recognition and separation in the measurement for cylindrical contour; the problem of information integrality in the measurement for cylindrical contour. Then it is mainly introduced that the development research of super-precision measurement for circle and cylindrical contour, including: error separation technology with non-harmonic suppression; laser monitoring technology of straight line datum movement; error separation technology among datums, etc. Finally, give a vista of new promising measurement technique, such as the contour measurement based on confocal microscopy, optical measuring techniques with non-datums and so on.

Compensating method of zero drift for magneto—sensing torque sensors

The paper analyses the torque error which is brought by zero drift and searches for the effective method to compensate the error. In accordence with the characteristics of wave form of signal two kinds of reasonable compensation method have been put forward. Experiments show that these methods possess ideal compensation effect. The zero drift of magneto-sensing torque sensor has been decreased to permissible extent.

Applying the adjusting method of least square to obtain original data of flatness error

In order to reflect the shape of measured flat fully and reasonably authors of the paper apply the least square method to the processing of original data. First of all the paper expounds the establishment of mathematical model by means of simple examples. Then the difference of accuracy of two patterns is compared under the condition when the number of measured points are same and the patterns of mensuring pathes are different. Thereby the scheme of measuring path which can reach higher accurary is determined. Finally through calculating two groups of data and comparing the results with that of traditianal method the correctness rcasonableness and practicality of the method are verified.