Wilfried Noell

Spectral phase, amplitude, and spatial modulation from ultraviolet to infrared with a reflective MEMS pulse shaper

We describe the performance of a reflective pulse-shaper based on a Micro-ElectroMechanical System (MEMS) linear mirror array. It represents a substantial upgrade of a preceding release [Opt. Lett. 35, 3102 (2010)] as it allows simultaneous piston and tilt mirror motion, allowing both phase- and binary amplitude-shaping with no wavelength restriction. Moreover, we show how the combination of in-axis and tilt movement can be used for active correction of spatial chirp.

Ultraviolet and near-infrared femtosecond temporal pulse shaping with a new high-aspect-ratio one-dimensional micromirror array

We demonstrate the capabilities of a new optical microelectromechanical systems device that we specifically developed for broadband femtosecond pulse shaping. It consists of a one-dimensional array of 100 independently addressable, high-aspect-ratio micromirrors with up to 3 μm stroke. We apply linear and quadratic phase modulations demonstrating the temporal compression of 800 and 400 nm pulses. Because of the devices surface flatness, stroke, and stroke resolution, phase shaping over an unprecedented bandwidth is attainable.

Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude

We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb-drive actuator allowing both piston and tilt motion for phase- and amplitude-shaping, and an X-shaped laterally reinforced spring preventing lateral snap-in while providing high flexibility for both degrees of freedom.

MEMS for space

Future space exploration will emphasize on cost effectiveness and highly focused mission objectives. Missions costs are directly proportional to its total weight, thus, the trend will be to replace bulky and heavy components of space carriers, communication and navigation platforms and of scientific payloads.

High aspect ratio micromirror array with two degrees of freedom for femtosecond pulse shaping

We show the first results of a linear 100-micromirror array capable of modulating the phase and amplitude of the spectral components of femtosecond lasers. Using MEMS-based reflective systems has the advantage of utilizing coatings tailored to the laser wavelength range. The innovative features of our device include a novel rotational, vertical comb-drive actuator and an X-shaped, laterally reinforced spring that prevents lateral snap-in while providing flexibility in the two degrees of freedom of each mirror, namely piston and tilt. The packaging utilizes high-density fine-pitch wire-bonding for on-chip and chip-to-PCB connectivity. For the first deployment, UV-shaped pulses will be produced to coherently control the dynamics of biomolecules.

Optical characterization of fully programmable MEMS diffraction gratings

We have fabricated and characterized fully programmable diffraction gratings consisting of 64 silicon micro-mirrors. The mirrors are 700µm long and 50µm wide with a fill factor of 90%. They are actuated electrostatically and move down by 1.25μm while showing negligible cross-talk and bowing as small as 0.14μm over 700μm. Extinction ratio up to 100 has been achieved by adjusting only 3 adjacent micro-mirrors. The gratings could operate either as light modulators up to 5μm or spectra generators up to 2.5μm.

Large MEMS-based programmable reflective slit mask for multi- object spectroscopy fabricated using multiple wafer-level bonding

Multi-object spectroscopy (MOS) allows measuring infrared spectra of faint astronomical objects that provides information on the evolution of the Universe. MOS requires a slit mask for object selection at the focal plane of the telescope. We are developing MEMS-based programmable reflective slit masks composed of 2048 individually addressable micromirrors. Each micromirror measures 100 × 200 μm2 and is electrostatically tilted by a precise angle of at least 20°. The main requirements for these arrays are precise and uniform tilt angle over the whole device, uniformity of the mirror electromechanical behavior, a flat mirror deformation and individual addressing capability of each mirror. This capability of our array is achieved using a line-column algorithm based on an optimized tilt angle/voltage hysteresis of the electrostatic actuator. Micromirror arrays composed of 2048 micromirrors (32 × 64) and modeled for individual addressing were fabricated using fusion and eutectic wafer-level bonding. These micromirrors without coating demonstrated a peak-to-valley deformation less than 8 nm and a tilt angle of 24° for an actuation voltage of 130 V. A first experiment of the linecolumn algorithm was demonstrated by actuating individually 2 × 2 micromirrors. In order, to avoid spoiling of the optical source by the thermal emission of the instrument, the micromirror array has to work in a cryogenic environment. Therefore, these devices were characterized in a cryogenic environment at -111°C and several lines of micromirrors were tilted successfully under these conditions.

Realization and characterization of a MEMS-based programmable slit mask for multi-object spectroscopy

Multi-object spectroscopy (MOS) is a powerful tool for space and ground-based telescopes for studying the formation of galaxies. This technique requires a programmable slit mask for astronomical object selection. A first sample of MEMS-based programmable reflective slit masks with elements of size 200×100 μm2 has been successfully tested in cryogenic conditions at 92 K. Devices of larger size were microfabricated, the largest chip measures 25×22 mm2 and is composed of 200×100 electrostatic actuated micromirrors. These devices are composed of two chips: the electrode chip and the mirror chip, which are processed separately and assembled consecutively. The mirror chip is bonded on top of the electrode chip and microfabricated pillars on the electrode chip provide the necessary spacing between the two parts. A process flow utilizing refilling techniques based on borophosphosilicate glass (BPSG) deposition and reflow was developed. Programmable reflective slit masks based on this fabrication process were microfabricated and characterized. These devices exhibit a micromirror deformation of 11 nm peak-to-valley and an actuation voltage of 145 V for a tilt angle of 9°. Preparation of samples for MOS experiments are underway.

Development of on-CMOS chip micro-photonic and MOEMS systems

Advanced 3D CAD and optical simulation software were used to design first iteration on-CMOS chip MOEMS micro-systems. A Si Avalanche-based LED and an array of detectors interface laterally with a single arm canti-lever system, all to be fabricated with CMOS technology. Silicon nitride wave-guides are used as optical propagation channels offering losses of lower than 1dB.cm-1. Micro-bending and multi-planing of the wave guiding is possible. Far-field manipulation of the emitted channel radiation is possible. Mechanically designed and sensor systems can be added by means of CMOS post processing techniques. The emission level of the Si CMOS Av LEDs is 10+3 higher than the detectivity of silicon p-i-n detectors, offering good dynamic range in detection and data analyses. The mature processing characteristics of CMOS technology offers high integration possibilities and low cost manufacturing of the designed systems.

Linear micromirror array for broadband femtosecond pulse shaping in phase and amplitude

We are developing a linear array of micromirrors designed for optical, femtosecond laser pulse shaping. It is a bulkmicromachined device, capable of retarding or diminishing certain laser frequencies in order to perform phase and amplitude modulation within a frequency band spanning the UV to the near-infrared. The design consists of a linear array of mirrors fixed on either side by springs. They feature two degrees of freedom: Out-of-plane motion for phase shifting and rotational motion for binary amplitude modulation, both realized using vertical comb drives. The first applications will include femtosecond discrimination experiments on biomolecules.