William F. Delaney

Fabrication of high-spatial-frequency gratings through computer-generated near-field holography

We demonstrate an innovative method for fabrication of high-spatial-frequency grating structures. This technique makes use of the near-field diffraction patterns from computer-generated phase holograms for lithographic fabrication of grating structures with periods that are one half that of the phase hologram mask. Linear, rectilinear, and circular gratings were fabricated with this technique. Experimental results from gratings with periods to 0.5 mum and feature sizes to ~0.2 mum are presented.

Advantages of genetic algorithm optimization methods in diffractive optic design

New systems are being developed around innovative diffractive optical components. Applications in optical interconnects, signal switching and interferometry have created a need for two-dimensional optical fanout gratings as well as complex Diffractive Optical Elements (DOE). The increasingly complex components being designed for such optical devices require specialized optimization algorithms to achieve desired performance. In this paper, we demonstrate the optimization of 1:K fanout gratings and symmetrical DOEs in a highly dimensional solution space using genetic algorithms (GA). Analytic results are presented for the optimization of an interconnect grating using different GA parameters to analyze the algorithm convergence. By means of these examples, we present design techniques for fanout gratings, radially symmetric DOEs, and polarization sensitive components.

Fabrication of micro optics on coreless fiber segments.

Fabrication of micro optics for fiber optics applications is a challenge due to their size and the issues associated with alignment of the optics to single-mode fibers. This study summarizes a method for fabricating diffractive optical elements on the ends of coreless fiber segments for passive alignment to single-mode fibers. Results are presented for passively aligned diffractive lens elements used for both collimation and beam shaping.

Subwavelength grating based metal-oxide nano-hair structures for optical vortex generation.

An all-dielectric, subwavelength grated based metal-oxide nano-hair structure for optical vortex beam generation has been presented in the paper. The nano-hair structure fabricated with alternating layers of alumina/hafnia on a fused silica substrate has a high diffraction efficiency of ~90% around the design wavelength, λ(o) = 1.55 μm and is insensitive to the polarization of the incident optical beam. The phase in transmission of these devices are controlled by azimuthally varying the fill fraction of the subwavelength grating. Realization of phase optical elements in an all-dielectric platform, based on subwavelength gratings offering full 0-2π phase modulation, is important for miniaturization and integration of conventional refractive optical elements.

Design and fabrication of customized illumination patterns for low-k1 lithography--a diffractive approach: II. Calcium fluoride controlled-angle diffusers

As CDs continue to shrink, lithographers are moving more towards using off-axis illumination schemes to increase their CD budget. There have been several papers over the last few years describing various custom illumination profiles designed for application specific optimization. These include various annular and quadrupole illumination schemes including weak quadrupole, CQUEST, and QuasarTM. Diffractive optics, if incorporated into the design of the illumination system, can be used to create arbitrary illumination profiles without the associated light loss, thus maintaining throughput while optimizing system performance. Diffractive optical elements used to generate efficient illumination profiles for 248 nm and 193 nm excimer laser-source scanners, have been reported and realized in fused silica. The fabrication of such elements in calcium fluoride (CaF2), for use in 157 nm wavelength lithographic projection tools has been developed and is presented in this paper. Three different categories of elements are shown: large-diagonal-cluster diffusers, medium- and small-rectangular-cluster diffusers. The diffusers were fabricated as binary phase devices, in order to determine calcium fluoride processing capabilities.

Microwave measurement of giant unilamellar vesicles in aqueous solution

A microwave technique is demonstrated to measure floating giant unilamellar vesicle (GUV) membranes in a 25 μm wide and 18.8 μm high microfluidic channel. The measurement is conducted at 2.7 and 7.9 GHz, at which a split-ring resonator (SRR) operates at odd modes. A 500 nm wide and 100 μm long SRR split gap is used to scan GUVs that are slightly larger than 25 μm in diameter. The smaller fluidic channel induces flattened GUV membrane sections, which make close contact with the SRR gap surface. The used GUVs are synthesized with POPC (16:0–18:1 PC 1-palmitoyl-2-oleoyl-sn-glycero-3-phosphocholine), SM (16:0 Egg Sphingomyelin) and cholesterol at different molecular compositions. It is shown that SM and POPC bilayers have different dielectric permittivity values, which also change with measurement frequencies. The obtained membrane permittivity values, e.g. 73.64-j6.13 for POPC at 2.7 GHz, are more than 10 times larger than previously reported results. The discrepancy is likely due to the measurement of dielectric polarization parallel with, other than perpendicular to, the membrane surface. POPC and SM-rich GUV surface sections are also clearly identified. Further work is needed to verify the obtained large permittivity values and enable accurate analysis of membrane composition.