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Wolfgang Schmutz

IBM

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Publication

Featured researches published by Wolfgang Schmutz.

Archive | 1991

Arrangement for storing, transporting and loading substrates

Gudrun Bohmer; Josef Gentischer; Rolf Lehner; Dieter Dipl Ing Modjesch; Wolfgang Schmutz

Archive | 1984

Arrangement for separating and transporting uppermost sheets of a stack of sheets or sheet-like objects

Egon Illig; Josef Gentischer; Wolfgang Schmutz

Archive | 1991

Spinning plate for substrates

Gudrun Bohmer; Josef Gentischer; Rolf Lehner; Dieter Dipl Ing Modjesch; Wolfgang Schmutz

Archive | 1998

Vorrichtung zum kontaminationsfreien, kontinuierlichen oder getakteten Transport von scheibenförmigen Gegenständen, insbesondere Substraten oder Wafern, durch eine geschlossene Behandlungsstrecke

Wolfgang Schmutz; Josef Gentischer; Ralf Preu; Rainer Moeller; Gunnar Guethenke; Guenter Schweitzer

Archive | 1998

Semiconductor wafer or disc transport device uses spaced jets for directing gas onto underside of transported wafers or discs with broken sections received in spaces between transport jets

Wolfgang Schmutz; Josef Gentischer; Ralf Preu; Rainer Moeller; Gunnar Guethenke; Guenter Schweitzer

Archive | 1984

Device for repeatedly separating and transferring the uppermost sheet of a stack of sheets

Egon Illig; Wolfgang Schmutz; Josef Gentischer

Archive | 1999

Device for loading substrates into and unloading them from a clean room

Wolfgang Schmutz; Josef Gentischer

Archive | 1998

Device for applying a thin coat on the surface of a screen of a cathode-ray tube

Roland Mann; Wolfgang Schmutz; Josef Gentischer

Archive | 2000

Means for handling substrates inside and outside an ultraclean workroom

Wolfgang Schmutz; Josef Gentischer

Archive | 1999

Einrichtung zum be- und entladen von substraten in bzw. aus einem reinraum

Wolfgang Schmutz; Josef Gentischer

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Josef Gentischer

IBM

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Dieter Dipl Ing Modjesch

IBM

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Rolf Lehner

IBM

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Gudrun Bohmer

IBM

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Gudrun Dipl Ing Boehmer

IBM

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