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Wouter Anthon Soer

ASML Holding

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Publication

Featured researches published by Wouter Anthon Soer.

Archive | 2007

Radiation system and lithographic apparatus

Arnoud Cornelis Wassink; Vadim Yevgenyevich Banine; Vladimir Vitalevitch Ivanov; Konstantin Nikolaevitch Koshelev; Theodorus Petrus Maria Cadee; Vladimir Mihailovitch Krivtsun; Derk Jan Wilfred Klunder; Maarten Marinus Johannes Wilhelmus Van Herpen; Paul Peter Anna Antonius Brom; Wouter Anthon Soer; Denis Alexandrovich Glushkov

Archive | 2006

Getter and cleaning arrangement for a lithographic apparatus and method for cleaning a surface

Maarten Marinus Johannes Wilhelmus Van Herpen; Vadim Yevgenyevich Banine; Johannes Hubertus Josephina Moors; Wouter Anthon Soer

Archive | 2007

Radiation system and lithographic apparatus comprising the same

Maarten Marinus Johannes Wilhelmus Van Herpen; Vadim Yevgenyevich Banine; Derk Jan Wilfred Klunder; Wouter Anthon Soer; Johannes Christiaan Leonardus Franken; Olav Waldemar Vladimir Frijns; Niels Machiel Driessen

Archive | 2010

LITHOGRAPHIC RADIATION SOURCE, COLLECTOR, APPARATUS AND METHOD

Wouter Anthon Soer; Martin Jacobus Johan Jak

Archive | 2008

SPECTRAL FILTER, LITHOGRAPHIC APPARATUS INCLUDING SUCH A SPECTRAL FILTER, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY

Maarten Marinus Johannes Wilhelmus Van Herpen; Vadim Yevgenyevich Banine; Wouter Anthon Soer

Archive | 2009

Spectral purity filter and lithographic apparatus

Maarten Marinus Johannes Wilhelmus Van Herpen; Wouter Anthon Soer

Archive | 2009

Spectral Purity Filters for Use in a Lithographic Apparatus

Wouter Anthon Soer; Vadim Yevgenyevich Banine; Maarten Marinus Johannes Wilhelmus Van Herpen; Andrey Mikhailovich Yakunin; Martin Jacobus Johan Jak

Archive | 2007

Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby

Wouter Anthon Soer; Maarten Marinus Johannes Wilhelmus Van Herpen

Archive | 2011

Components for EUV Lithographic Apparatus, EUV Lithographic Apparatus Including Such Components and Method for Manufacturing Such Components

Martin Jacobus Johan Jak; Vadim Yevgenyevich Banine; Wouter Anthon Soer; Andrei Mikhailovich Yakunn; Maarten Van Kampen; Gerard Frans Jozef Schasfoort

Archive | 2011

SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS INCLUDING SUCH A SPECTRAL PURITY FILTER AND DEVICE MANUFACTURING METHOD

Wouter Anthon Soer; Maarten Marinus Johannes Wilhelmus Van Herpen; Martin Jacobus Johan Jak

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Martin J. J. Jak

Philips

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Konstantin Nikolaevitch Koshelev

Russian Academy of Sciences

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