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Xi Pei

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Publication

Featured researches published by Xi Pei.

Archive | 2013

Formation method of 3D magnetic sensor

Xiong Lei; Xi Pei; Zhang Zhenxing; Wang Jianpeng; Shi Ting

Archive | 2013

Etching method for triaxial magnetic sensor

Xiong Lei; Xi Pei; Zhang Zhenxing

Archive | 2014

Manufacturing method of micro-electromechanical system (MEMS) apparatus

Zhang Zhenxing; Xi Pei; Xiong Lei

Archive | 2013

TaN etching polymer residue removing method used for MEMS technology

Zhang Zhenxing; Xi Pei; Xiong Lei

Archive | 2014

Post-etching ashing method and forming method of magnetic sensor

Zhang Zhenxing; Xi Pei; Xiong Lei

Archive | 2014

Manufacturing method of MEMS (micro-electro-mechanical system) device

Zhang Zhenxing; Xi Pei; Xiong Lei; Wang Jianpeng; Shi Ting

Archive | 2014

Etching method of TaN and forming method of magnetic sensor

Zhang Zhenxing; Xi Pei; Xiong Lei

Archive | 2013

Formation method of flash memory storage cell

Xi Pei; Zhang Zhenxing

Archive | 2015

Tantalum nitride etching method for 3D Anisotropic Magnetoresistance (AMR)

Xiong Lei; Xi Pei; Zhang Zhenxing

Archive | 2015

Deep groove manufacturing method

Zhang Zhenxing; Xi Pei; Xiong Lei

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Collaboration

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