Xiaoli Zhu

Spiral photon sieves apodized by digital prolate spheroidal window for the generation of hard-x-ray vortex

We extend the work of photon sieves to spiral photon sieves (SPSs) for the generation of a hard-x-ray vortex. A robust digital prolate spheroidal window, which has an optimal energy concentration at low frequencies, was used to adjust the number of pinholes on each ring of the SPS. It was demonstrated that an SPS has better spatial resolution and lower background than a spiral zone plate using the specified smallest structures condition. The intensity at the center of the dark core is difficult to damp to true zero, primarily owing to current limitations of high-aspect-ratio metal nanostructures. The diameter of the dark core increases as the charge value increases. However, the FWHM of the doughnut-shaped ring and background will also increase. Our results pave the way toward the design of high-performance SPSs for the generation of a hard-x-ray vortex.

Feasibility study of hard-x-ray nanofocusing above 20 keV using compound photon sieves.

Combining the advantages of photon sieves (PSs) and compound Fresnel zone plates (CZPs), we designed compound photon sieves (CPSs) for hard-x-ray nanofocusing. A CPS consists of an inner PS using the first-order diffraction surrounded by an outer zone plate using the third-order diffraction. A robust digital prolate spheroidal window was used as an apodization window for the inner PS, making CPSs more flexible than CZPs. CPSs can provide not only slightly better resolution compared to CZPs, but also it can significantly suppress the sidelobes, leading to a high signal-to-noise ratio. Further improvement of the high-aspect-ratio metal nanostructure process will allow CPSs to be a promising candidate for hard-x-ray nanofocusing in the high-energy region above 20 keV.

Toward two-dimensional nanometer resolution hard X-ray differential-interference-contrast imaging using modified photon sieves

In this Letter, we report a significant step forward in the design of single-optical-element optics for two-dimensional (2D) hard X-ray differential-interference-contrast (DIC) imaging based on modified photon sieves (MPSs). MPSs were obtained by a modified optic, i.e., combining two overlaid binary gratings and a photon sieve through two logical XOR operations. The superior performance of MPSs was demonstrated. Compared to Fresnel zone plates-based DIC diffractive optical elements (DOEs), which help to improve contrast only in one direction, MPSs can provide better resolution and 2D DIC imaging. Compared to normal photon sieves, MPSs are capable of imaging at a significantly higher image contrast. We anticipate that MPSs can provide a complementary and versatile high-resolution nondestructive imaging tool for ultra-large-scale integrated circuits at 45 nm node and below.

Quasi-sinusoidal single-order diffraction transmission grating used in x-ray spectroscopy

A novel design of quasi-sinusoidal single-order diffraction transmission grating (QSTG) is proposed, which can achieve a line density up to thousands line/millimeter as that of traditional transmission gratings with the current level of nanofabrication technique. We fabricate a 1000 line/mm QSTG using the new design approach, and display the calibration results of such QSTG on the soft x-ray beam of synchrotron radiation.

Elimination of higher-order diffraction using zigzag transmission grating in soft x-ray region

We present a realization of the sinusoidal transmission function using a series of zigzag-profiled strips where the transmission takes on the binary values 0 and 1 in a two-dimensional distribution. A zigzag transmission grating of 1000 line/mm has been fabricated and demonstrated on the soft x-ray beam of synchrotron radiation. The axial single-order diffraction indicates that the zigzag transmission grating is adequate for spectroscopic application.

Note: Continuing improvements on the novel flat-response x-ray detector

This note describes multi-updates of the novel flat-response x-ray detector in fabrication technology, experimental application, and data uncertainty evaluation. Unlike the previous design, the compound filter is combined into one piece through an improved fabrication process that greatly enhanced its self-supporting capability. A method of pinhole-array imaging is introduced into the experimental application process to stop any debris from the hohlraum and to uniformly reduce the radiation flux. The experimental results show that this method works well. Furthermore, a method of uncertainty evaluation of the radiation flux measurement by the novel flat-response x-ray detector has been developed. The influence of the radiation spectrum to the flux measurement is analyzed. The evaluation shows that the relative uncertainty of the radiation flux is about 10% in higher radiation temperature condition (Tr > 150 eV) and 16% in lower radiation temperature condition (Tr < 100 eV).

Fabrication of x-ray diffractive optical elements for laser fusion applications

Abstract. We review our recent progress on the fabrication of x-ray diffractive optical elements (DOEs) by combining complementary advantages of electron beam, x-ray, and proximity optical lithography. First, an electron beam lithography tool with an accelerating voltage of 100 kV is used to expose initial x-ray mask based on SiC membrane with a low aspect ratio. Second, x-ray lithography is used to replicate x-ray DOEs and amplify the aspect ratio up to 14:1. Third, proximity optical lithography is used to fabricate a large-scale gold mesh as the supporting structures. We demonstrate that this method can achieve high aspect ratio metal nanometer structures without the need of a complicated multilayer resist process. A large number of x-ray DOEs have been fabricated with feature sizes down to 100 nm for the purpose of laser plasma fusion applications. Among them, the ninth-order diffraction peak on the positive side of the zeroth order can be observed for both 3333 and 5000  lines/mm x-ray gold transmission gratings.

A ZEP520-LOR bilayer resist lift-off process by e-beam lithography for nanometer pattern transfer

In this work, a bilayer resist system with ZEP520 as the top layer and lift-off resist (LOR) as the bottom layer for lift-off process was investigated for the first time. The formation of undercut was studied as a critical step which makes lift-off process much more feasible in bilayer resist process. Using different dissolution rates of LOR layer, the length of undercut can be well controlled, providing reliable process. The top layer of ZEP520 is more efficient than other resists (PMMA etc.) for e-beam lithography, due to its high resolution and high sensitivity. Here, a set of process parameters have been optimized to fabricate Cr metal lines with a width of less than 70 nm. This bilayer lift-off resist system can be widely used in nano-fabrication for various nano-scale structures and devices.

Quantum-dot-array diffraction grating with single order diffraction property for soft x-ray region

A gold transmission grating is used routinely to disperse the x-ray spectrum at the Z soft x-ray facility to measure the spectrum and temporal history of the absolute soft x-ray power emitted from z-pinch and hohlraum radiation sources. A quantum-dot-array diffraction grating (QDADG) of 250 lines/mm for soft x-ray is designed and fabricated for the first time according to the principle of binary sinusoidal transmission grating. The diffraction efficiencies of the grating are measured in the 150-300 eV photon energy range on the Beamline 3W1B of Beijing Synchrotron Radiation Facility. This article describes the basic concept and calibration techniques and presents calibration results. It is shown that the 250 lines/mm QDADG can be used to disperse light without higher-order diffractions in soft x-ray range, and the diffraction efficiencies of this grating are nearly constant (about 25%), which is beneficial in the spectrum analysis.

Quasi-periodic gratings: diffraction orders accelerate along curves

Light diffracting to different diffraction orders of a periodic grating generally propagates along a set of straight trajectories. Here we show that certain quasi-periodic gratings can produce curved diffraction orders. These curved lobes are created by the caustic interference of the originally straight diffraction orders and manifest themselves as accelerating beams. Both numerical simulations and experimental results demonstrate the validity of multiple accelerating beam generation with a single binary grating. Our work makes a quantitative link between the quasi-periodicity of a grating and the resulting caustic diffraction orders. Furthermore, the use of binary devices has important applications in acoustics, x-ray optics, and electron beam engineering and is also useful when high optical power is needed.