Xiaoqiang Peng

Optimization and application of influence function in abrasive jet polishing

We analyze the material removal mechanism of abrasive jet polishing (AJP) technology, based on the fluid impact dynamics theory. Combined with the computational fluid dynamics simulation and process experiments, influence functions at different impingement angles are obtained, which are not of a regular Gaussian shape and are unfit for the corrective figuring of optics. The influence function is then optimized to obtain an ideal Gaussian shape by rotating the oblique nozzle, and its stability is validated through a line scanning experiment. The fluctuation of the influence function can be controlled within +/-5%. Based on this, we build a computed numerically controlled experimental system for AJP, and one flat BK7 optical glass with a diameter of 20mm is polished. After two iterations of polishing, the peak-to-valley value decreases from 1.43lambda (lambda=632.8nm in this paper) to 0.294lambda, and the rms value decreases from 0.195lambda to 0.029lambda. The roughness of this polished surface is within 2nm. The experimental result indicates that the optimized influence function is suitable for precision optics figuring and polishing.

Calibration and prediction of removal function in magnetorheological finishing

A calibrated and predictive model of the removal function has been established based on the analysis of a magnetorheological finishing (MRF) process. By introducing an efficiency coefficient of the removal function, the model can be used to calibrate the removal function in a MRF figuring process and to accurately predict the removal function of a workpiece to be polished whose material is different from the spot part. Its correctness and feasibility have been validated by simulations. Furthermore, applying this model to the MRF figuring experiments, the efficiency coefficient of the removal function can be identified accurately to make the MRF figuring process deterministic and controllable. Therefore, all the results indicate that the calibrated and predictive model of the removal function can improve the finishing determinacy and increase the model applicability in a MRF process.

Novel magnetorheological f iguring of KDP crystal

A new process of magnetorheological figuring (MRF) based on the deliquescence theory is proposed to finish KDP crystals. A novel, non-aqueous, and abrasive-free magnetorheological (MR) fluid is explored, and polishing experiments are performed on a self-developed MRF machine. The removal mechanism is reckoned to be the result of a combination of dominant chemical etching and accessorial mechanical drag. The results indicate that the surface roughness of I plate KDP of 80×80 (mm) polished by MRF is 1.2 nm (root mean square (RMS)), and the tool marks are completely removed. The surface accuracy by MRF is 0.035\lambda (RMS), and the low/middle-frequency errors are significantly corrected after MRF.

Magnetorheological elastic super-smooth finishing for high-efficiency manufacturing of ultraviolet laser resistant optics

Abstract. Based on the elastic–plastic deformation theory, status between abrasives and workpiece in magnetorheological finishing (MRF) process and the feasibility of elastic polishing are analyzed. The relationship among material removal mechanism and particle force, removal efficiency, and surface topography are revealed through a set of experiments. The chemical dominant elastic super-smooth polishing can be fulfilled by changing the components of magnetorheological (MR) fluid and optimizing polishing parameters. The MR elastic super-smooth finishing technology can be applied in polishing high-power laser–irradiated components with high efficiency, high accuracy, low damage, and high laser-induced damage threshold (LIDT). A 430×430×10  mm fused silica (FS) optic window is polished and surface error is improved from 538.241 nm [peak to valley (PV)], 96.376 nm (rms) to 76.372 nm (PV), 8.295 nm (rms) after 51.6 h rough polishing, 42.6 h fine polishing, and 54.6 h super-smooth polishing. A 50×50×10  mm sample is polished with exactly the same parameters. The roughness is improved from 1.793 nm [roughness average (Ra)] to 0.167 nm (Ra) and LIDT is improved from 9.77 to 19.2  J/cm2 after MRF elastic polishing.

Removal of single point diamond-turning marks by abrasive jet polishing

Single point diamond turning (SPDT) is highly controllable and versatile in producing axially symmetric forms, non-axially-symmetric forms, microstructured surfaces, and free forms. However, the fine SPDT marks left in the surface limit its performance, and they are difficult to reduce or eliminate. It is unpractical for traditional methods to remove the fine marks without destroying their forms, especially for the aspheres and free forms. This paper introduces abrasive jet polishing (AJP) for the posttreatment of diamond-turned surfaces to remove the periodic microstructures. Samples of diamond-turned electroless nickel plated plano mirror were used in the experiments. One sample with an original surface roughness of more than 400 nm decreased to 4 nm after two iterations abrasive jet polishing; the surface roughness of another sample went from 3.7 nm to 1.4 nm after polishing. The periodic signatures on both of the samples were removed entirely after polishing. Contrastive experimental research was carried out on electroless nickel mirror with magnetorheological finishing, computer controlled optical surfacing, and AJP. The experimental results indicate that AJP is more appropriate in removing the periodic SPDT marks. Also, a figure maintaining experiment was carried out with the AJP process; the uniform polishing process shows that the AJP process can remove the periodic turning marks without destroying the original form.

Model and algorithm based on accurate realization of dwell time in magnetorheological finishing.

Classically, a dwell-time map is created with a method such as deconvolution or numerical optimization, with the input being a surface error map and influence function. This dwell-time map is the numerical optimum for minimizing residual form error, but it takes no account of machine dynamics limitations. The map is then reinterpreted as machine speeds and accelerations or decelerations in a separate operation. In this paper we consider combining the two methods in a single optimization by the use of a constrained nonlinear optimization model, which regards both the two-norm of the surface residual error and the dwell-time gradient as an objective function. This enables machine dynamic limitations to be properly considered within the scope of the optimization, reducing both residual surface error and polishing times. Further simulations are introduced to demonstrate the feasibility of the model, and the velocity map is reinterpreted from the dwell time, meeting the requirement of velocity and the limitations of accelerations or decelerations. Indeed, the model and algorithm can also apply to other computer-controlled subaperture methods.

Research on error control and compensation in magnetorheological finishing

Although magnetorheological finishing (MRF) is a deterministic finishing technology, the machining results always fall short of simulation precision in the actual process, and it cannot meet the precision requirements just through a single treatment but after several iterations. We investigate the reasons for this problem through simulations and experiments. Through controlling and compensating the chief errors in the manufacturing procedure, such as removal function calculation error, positioning error of the removal function, and dynamic performance limitation of the CNC machine, the residual error convergence ratio (ratio of figure error before and after processing) in a single process is obviously increased, and higher figure precision is achieved. Finally, an improved technical process is presented based on these researches, and the verification experiment is accomplished on the experimental device we developed. The part is a circular plane mirror of fused silica material, and the surface figure error is improved from the initial λ/5 [peak-to-valley (PV) λ=632.8 nm], λ/30 [root-mean-square (rms)] to the final λ/40 (PV), λ/330 (rms) just through one iteration in 4.4 min. Results show that a higher convergence ratio and processing precision can be obtained by adopting error control and compensation techniques in MRF.

Combined technique of elastic magnetorheological finishing and HF etching for high-efficiency improving of the laser-induced damage threshold of fused silica optics

The inadequate laser-induced damage threshold (LIDT) of optical elements limits the future development of high-power laser systems. With the aim of raising the LIDT, the elastic passivating treatment mechanism and parameter optimization of a combined magnetorheological finishing (MRF) and HF etching process are investigated. The relationships among the width/depth ratio of defects and parameters of the passivating treatment process (MRF and HF etching), relative intensity (RI), and LIDT of fused silica (FS) optics are revealed through a set of simulations and experiments. For high-efficiency improvement of LIDT, in an elastic passivating treatment process, scratches or other defects need not be wiped off entirely, but only passivated or enlarged to an acceptable profile. This combined process can be applied in polishing high-power-laser-irradiated components with high efficiency, low damage, and high LIDT. A 100  mm×100  mm×10  mm FS optic window is treated, and the width/depth ratio rises from 3 to 11, RI decreases from 4 to 1.2, and LIDT is improved from 7.8 to 17.8  J/cm2 after 385 min of MRF elastic polishing and 60 min of HF etching. Comparing this defect-carrying sample to the defect-free one, the MRF polishing time is shortened, obviously, from 1100 to 385 min, and the LIDT is merely decreased from 19.4 to 17.8  J/cm2. Due to the optimized technique, the fabricating time was shortened by a factor of 2.6, while the LIDT decreased merely 8.2%.

Research of polishing process to control the iron contamination on the magnetorheological finished KDP crystal surface

A new nonaqueous and abrasive-free magnetorheological finishing (MRF) method is adopted for processing a KDP crystal. MRF polishing is easy to result in the embedding of carbonyl iron (CI) powders; meanwhile, Fe contamination on the KDP crystal surface will affect the laser induced damage threshold seriously. This paper puts forward an appropriate MRF polishing process to avoid the embedding. Polishing results show that the embedding of CI powders can be avoided by controlling the polishing parameters. Furthermore, on the KDP crystal surface, magnetorheological fluids residua inevitably exist after polishing and in which the Fe contamination cannot be removed completely by initial ultrasonic cleaning. To solve this problem, a kind of ion beam figuring (IBF) polishing is introduced to remove the impurity layer. Then the content of Fe element contamination and the depth of impurity elements are measured by time of flight secondary ion mass spectrometry. The measurement results show that there are no CI powders embedding in the MRF polished surface and no Fe contamination after the IBF polishing process, respectively. That verifies the feasibility of MRF polishing-IBF polishing (cleaning) for processing a KDP crystal.

Calculation of subaperture aspheric departure in lattice design for subaperture stitching interferometry

We demonstrate a method to solve the main problem involved in lattice design for subaperture stitching interferometry. That is calculation of the aspheric departure of a subaperture whose location is given arbitrarily. The simulated measurement data with unknown phase values are transformed into the global model frame, which satisfy the nominal surface equation. Then the phase values can be solved and used to calculate the aspheric departure with piston, tilts, and power removed. Accordingly, the subaperture lattice is determined with preferred interferometer parameters.