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Xinkang Tian

Tokyo Electron

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Publication

Featured researches published by Xinkang Tian.

Archive | 2011

Etch stage measurement system

Xinkang Tian; Manuel Madriaga

Archive | 2011

Etch process control using optical metrology and sensor devices

Manuel Madriaga; Xinkang Tian

Archive | 2008

Process control using an optical metrology system optimized with signal criteria

Xinkang Tian; Manuel Madriaga; Ching-Ling Meng; Mihail Mihalov

Archive | 2008

Optical metrology system optimized with design goals

Xinkang Tian; Manuel Madriaga; Ching-Ling Meng; Mihail Mihaylov

Archive | 2008

AUTOMATED PROCESS CONTROL USING AN OPTICAL METROLOGY SYSTEM OPTIMIZED WITH DESIGN GOALS

Xinkang Tian; Manuel Madriaga; Ching-Ling Meng; Mihail Mihaylov

Archive | 2008

Apparatus for auto focusing a workpiece using two or more focus parameters

Adam Norton; Xinkang Tian; Manuel Madriaga

Archive | 2008

Optical metrology system optimized with a plurality of design goals

Xinkang Tian; Manuel Madriaga; Ching-Ling Meng; Mihail Mihaylov

Archive | 2008

DESIGNING AN OPTICAL METROLOGY SYSTEM OPTIMIZED WITH SIGNAL CRITERIA

Xinkang Tian; Manuel Madriaga; Ching-Ling Meng; Mihail Mihalov

Archive | 2011

Method of designing an etch stage measurement system

Xinkang Tian; Manuel Madriaga

Archive | 2009

Controlling angle of incidence of multiple- beam optical metrology tools

Adam Norton; Xinkang Tian

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Collaboration

Dive into the Xinkang Tian's collaboration.

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Manuel Madriaga

Tokyo Electron

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Ching-Ling Meng

Tokyo Electron

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Mihail Mihaylov

Tokyo Electron

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Mihail Mihalov

Tokyo Electron

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Adam Norton

Tokyo Electron

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Badru D. Hyatt

Tokyo Electron

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Edric Tong

Tokyo Electron

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Jason Ferns

Tokyo Electron

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Joel Ng

Tokyo Electron

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Zheng Yan

Tokyo Electron

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