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Dive into the research topics where Xu Yongyue is active.

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Featured researches published by Xu Yongyue.


Chinese Physics Letters | 2012

Temperature Characteristics of Cathode Sheath in High-Pressure Volume Discharge Derived from Emanating Shock Wave

Yang Chenguang; Xu Yongyue; Zuo Duluo

The temperature characteristics of cathode sheath in high-pressure volume discharge are investigated experimentally. The cathode sheath temperatures under various discharge conditions are derived from the speeds of the emanating shock waves which are measured by a Mach—Zehnder interferometry. It is found that the cathode sheath temperature and the ratio ΔT3/ΔT1 of temperature rise between cathode sheath and plasma bulk are determined by the specific energy deposition and the breakdown delay time respectively. These results are helpful for discharge stability improving and shock wave reducing.


Archive | 2014

Monitoring system for liquid drop target space positions in light sources of extreme ultraviolet photoetching machine

Xu Yongyue; Wang Xinbing; Zuo Duluo; Lu Hong; Lu Peixiang


Archive | 2013

Measuring system for fan vibration of pulsed gas laser

Xu Yongyue; Yang Chenguang; Zuo Duluo; Wang Xinbing; Lu Hong; Lu Peixiang; He Chongwen; Hu Panpan


Archive | 2013

Device and method for adjusting ring cavity of excimer laser device

Hu Shouyan; Zhu Jianping; Hu Yaowen; Xu Yongyue; Zuo Duluo; Wang Xinbing; Lu Peixiang


Archive | 2014

Molecular gas laser intracavity gas temperature monitoring device and method thereof

Yang Chenguang; Xu Yongyue; Zuo Duluo; Wang Xinbing; Lu Peixiang; Tang Jian; He Chongwen; Hu Panpan


Archive | 2013

Measuring device of performance of high-power linear polarization laser beam

Yang Man; Zuo Duluo; Wang Xinbing; Lu Peixiang; Xu Yongyue; Hu Yaowen; Tu Pin


Archive | 2013

Excimer laser power oscillator resonant cavity based on frustrated total reflection

Hu Shouyan; Xu Yongyue; Zuo Duluo; Wang Xinbing; Lu Peixiang


Archive | 2013

Device and method for measuring disturbance of cross flow fan impeller of pulsed gas laser

Xu Yongyue; Yang Chenguang; Tang Jian; Zuo Duluo; Wang Xinbing; Lu Hong; Lu Peixiang


Archive | 2013

Discharge plasma electron density measuring device and method based on two-quadrant detector

Yang Chenguang; Li Bin; Zuo Duluo; Wang Xinbing; Lu Peixiang; Tang Jian; Xu Yongyue; Liu Li


Archive | 2013

Space-time distribution measuring device for discharge plasma spectrum

Tang Jian; Xu Yongyue; Zuo Duluo; Wang Xinbing; Lu Peixiang; Yang Chenguang; Li Bin; Tu Pin

Collaboration


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Zuo Duluo

Huazhong University of Science and Technology

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Wang Xinbing

Huazhong University of Science and Technology

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Yang Chenguang

Huazhong University of Science and Technology

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Lu Hong

Huazhong University of Science and Technology

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Tang Jian

Huazhong University of Science and Technology

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Zhu Haihong

Huazhong University of Science and Technology

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