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Xuan Lin

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Publication

Featured researches published by Xuan Lin.

Archive | 2005

Copper electrodeposition in microelectronics

Vincent Paneccasio; Xuan Lin; Paul Figura; Richard Hurtubise

Archive | 2008

Copper metallization of through silicon via

Thomas B. Richardson; Yun Zhang; Chen Wang; Vincent Paneccasio; Cai Wang; Xuan Lin; Richard Hurtubise; Joseph Anthony Abys

Archive | 2002

Defect reduction in electrodeposited copper for semiconductor applications

John Commander; Richard Hurtubise; Vincent Paneccasio; Xuan Lin; Kshama Jirage

Archive | 2007

Copper deposition for filling features in manufacture of microelectronic devices

Xuan Lin; Richard Hurtubise; Vincent Paneccasio; Qingyun Chen

Archive | 2008

Surface preparation process for damascene copper deposition

Qingyun Chen; Xuan Lin; Vincent Paneccasio; Richard Hurtubise

Archive | 2009

Electrodeposition of copper in microelectronics with dipyridyl-based levelers

Vincent Paneccasio; Xuan Lin; Richard Hurtubise; Qingyun Chen

Archive | 2008

COBALT CAPPING SURFACE PREPARATION IN MICROELECTRONICS MANUFACTURE

Qingyun Chen; Vincent Paneccasio; Xuan Lin; Richard Hurtubise

Archive | 2012

Process for filling vias in the microelectronics

Thomas B. Richardson; Joseph Anthony Abys; Wenbo Shao; Chen Wang; Vincent Paneccasio; Cai Wang; Xuan Lin; Theodore Antonellis

Archive | 2003

Reduction of defect in electrodeposition copper for semiconductor application

John Commander; Richard Hurtubise; Kshama Jirage; Xuan Lin; Vincent Paneccasio; カシャマ ジレージ; ジョン コマンダー; ズアン リン; ビンセント パネカッシオ; リチャード ハーテュバイス

Archive | 2014

Method and composition for electrodeposition of copper in microelectronics with dipyridyl-based levelers

Vincent Paneccasio; Xuan Lin; Richard Hurtubise; Qingyun Chen

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Collaboration

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Joseph Anthony Abys

AT

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Yun Zhang

Alcatel-Lucent

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Chen Wang

Dalian Medical University

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