Xueliang Zhu

Aspheric Surface Measurement Using Capacitive Sensors

This paper proposes a new method for the measurement of spherical coordinates by using capacitive sensors as a non-contact probe solution of measurement of aspheric surfaces. The measurement of the average effect of the capacitive probe and the influence of capacitive probe tilting were studied with respect to an eccentric spherical surface. Based on the tested characteristic curve of the average effect of the sphere and probe, it was found that nonlinear and linear compensation resulted in high measurement accuracy. The capacitance probe was found to be trying to fulfill a need for performing nm-level precision measurement of aspheric electromagnetic surfaces.

Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect

A multi-repeated photolithography method for manufacturing an incremental linear scale using projection lithography is presented. The method is based on the average homogenization effect that periodically superposes the light intensity of different locations of pitches in the mask to make a consistent energy distribution at a specific wavelength, from which the accuracy of a linear scale can be improved precisely using the average pitch with different step distances. The method’s theoretical error is within 0.01 µm for a periodic mask with a 2-µm sine-wave error. The intensity error models in the focal plane include the rectangular grating error on the mask, static positioning error, and lithography lens focal plane alignment error, which affect pitch uniformity less than in the common linear scale projection lithography splicing process. It was analyzed and confirmed that increasing the repeat exposure number of a single stripe could improve accuracy, as could adjusting the exposure spacing to achieve a set proportion of black and white stripes. According to the experimental results, the effectiveness of the multi-repeated photolithography method is confirmed to easily realize a pitch accuracy of 43 nm in any 10 locations of 1 m, and the whole length accuracy of the linear scale is less than 1 µm/m.

Study on phase demodulation technique with fast and high accuracy for interference fringe pattern

Due to environmental interference and atmospheric disturbance and other factors, the interference fringes are always drifting. So, the traditional hardware phase shift could not meet the high accuracy demodulation of interference. In this paper, virtual phase shift based on moiré fringes are introduced to realize the phase demodulation of interference fringe. The virtual digital phase shifting interference fringes are generated by computer, and superposed with tested interference fringe to generate phase shifting moire fringe, which are processed through applying phase shift demodulation techniques and the Fourior transform then to obtain the phase information tested. To verify the technique here, a specific experiment for a diameter of 50mm flat optics is executed, and the experimental result is compared with ZYGO-verifire PE interferometer. Our method eliminates the nonlinear error of the hardware phase shifter while improving the processing accuracy, and especially suitable for high-precision testing for optical component with complex environment or for large-aperture optical component, or even the system greatly simplifies the structure of interferometer.

Research on the calibration method of reference flat based on gravity deformation

In high-precision vertical large-caliber flat interferometry, the gravity deformation of the reference flat will lead to a large error of the surface shape measured. Based on the analysis of the finite element method, this paper combines the three flats test method with Zernike polynomial fitting to compensate and calibrate the error of the reference flat. For the diameter of 300 mm and a thickness of 90 mm of the fused silica reference flat, the results of analysis show that the PV deformation under the T-bracing is 0.021 λ. (λ = 632.8nm). The simulation test result of the influence of deformation on the three-flats test shows that the reference flat the gravity deformation not only affects the detection of self surface, but also has a great influence on the surface detection results of the undeformed flat. And the PV of the surface shape detection results residual is close to 0.011λ. In the end, the new calibration method base on compensate reference deformation for three flats test was proposed, and the validity was verified by simulation.

Research of the wavefront detection method based on the scanning pentaprism

With the rapid developing of science and technology, large aperture optical system plays an important role in the hightech fields including space optics, astronomical optics, inertial confinement fusion, the detecting and recognizing of space target. However, the problems of the wavefront sensing about large aperture optical system has been totally solved because of the equipment expenses and long manufacturing periods. In order to test the large aperture elements in optical system with cheaper costs and higher resolution, more and more attentions are paid into the wavefront sensing of large aperture optical systems. The scanning pentaprism system is introduced to divide the wavefront of the interferometer into a series of sub-wavefront, and the relative positions of the spot centroid accroding to every sub-wavefront are recorded on the CCD camera. The normal directions of every sub-wavefront are obtained to reconstruct the tested wavefront. Experimental results are accord with the interferometer measure results. The feasibility of the pentaprism scanning method has been validated. Finally the influences of measurement apparatus and environment on the measuring precision is discussed. Which is useful to expand the measuring range to keep high spatial resolution and reduce cost.

Mechanism and experimental research on ultra-precision grinding of ferrite

Ultra-precision grinding of ferrite is conducted to investigate the removal mechanism. Effect of the accuracy of machine tool key components on grinding surface quality is analyzed. The surface generation model of ferrite ultra-precision grinding machining is established. In order to reveal the surface formation mechanism of ferrite in the process of ultraprecision grinding, furthermore, the scientific and accurate of the calculation model are taken into account to verify the grinding surface roughness, which is proposed. Orthogonal experiment is designed using the high precision aerostatic turntable and aerostatic spindle for ferrite which is a typical hard brittle materials. Based on the experimental results, the influence factors and laws of ultra-precision grinding surface of ferrite are discussed through the analysis of the surface roughness. The results show that the quality of ferrite grinding surface is the optimal parameters, when the wheel speed of 20000r/mm, feed rate of 10mm/min, grinding depth of 0.005mm, and turntable rotary speed of 5r/min, the surface roughness Ra can up to 75nm.

Analysis of noise reduction performance with the rotated diffuser in Fizeau interferometer of a large aperture

Since the coherent noise affected the quality of the Fizeau’s interferograms in the large aperture, the coherence of the beam was changed by rotated diffuser to reduce the noise of the interfering system. The relationships between the frequency of the rotated diffuser, the contrast of the fringes and the SNR of the system were simulated. Then, the control parameters of rotated diffuser would be required in the optimum interference fringe. The interference images were obtained under different control parameters, and the fringe contrast and system SNR of each image were analyzed. The results showed that the contrast can be reduced by choosing the proper frequency of the rotated diffuser in a certain extent, but the SNR can be improved effectively and it was convenient to process the interference image later.

Microstructure measurement of digital holography

Miniaturization is a development trend of electronics, machinery and information systems, while micro structure brought a large amount of new development for industrial and research applications, whereas, slow measuring speed and two-dimensional results of traditional micro measurement could not meet our needs, it’s urgent to find a matching testing techniques with more sensitivity, more effectiveness and better to have a real-time three-dimensional display. Digital holography applied to the measurement of micro structure, it made up for the lacking of traditional micro structure measure systems of too much time consuming, poor immunity, easily damaging samples with its simple structure, high accuracy, non contact features and three-dimensional reproduction. This paper analyzed the key factors of digital holographic recording and reproducing process.In order to solve the low quality of holograms captured by traditional recording system, holograms and pre-processing algorithm was combined for real-time, by observing the holograms and delicate adjusting the system, to ensure that the collected holograms with full use of CCD width while convenient for subsequent processing. In the processing of reproduction,the influence of spectrum choice, reconstruction wavelength and algorithms and unwrapping algorithm was been studied, and finally obtained an accurate three-dimensional topography of the object. The improved rerecording system and reconstruction algorithm mentioned above solved the low holography quality, much noise and not clear shortcomings of the reconstructed image. Experiment on a raster, compared with traditional system and algorithm results, results showed that the recording system and determine algorithms can reproduce the three-dimensional topography of the object with high precision and has a broader applicability.

On-line measurement of diameter of hot-rolled steel tube

In order to design a online diameter measurement system for Hot-rolled seamless steel tube production line. On one hand, it can play a stimulate part in the domestic pipe measuring technique. On the other hand, it can also make our domestic hot rolled seamless steel tube enterprises gain a strong product competitiveness with low input. Through the analysis of various detection methods and techniques contrast, this paper choose a CCD camera-based online caliper system design. The system mainly includes the hardware measurement portion and the image processing section, combining with software control technology and image processing technology, which can complete online measurement of heat tube diameter. Taking into account the complexity of the actual job site situation, it can choose a relatively simple and reasonable layout. The image processing section mainly to solve the camera calibration and the application of a function in Matlab, to achieve the diameter size display directly through the algorithm to calculate the image. I build a simulation platform in the design last phase, successfully, collect images for processing, to prove the feasibility and rationality of the design and make error in less than 2%. The design successfully using photoelectric detection technology to solve real work problems