Y. Itikawa

Energy dependence of the ion-induced sputtering yields of monatomic solids

Abstract The ion-induced sputtering yields of monatomic solids are presented graphically for various ion-target combinations as a function of the energy of normally incident ions. Each graph shows the available experimental data points for an ion-target combination and the energy dependence of the sputtering yield calculated from an empirical formula whose parameters were determined by the best fit to available data. The method of calculating the sputtering yields for any ion-target combination based upon the empirical formula is also described.

A semiempirical formula for the energy dependence of the sputtering yield

Abstract We have derived a simple empirical formula for sputtering yields of monatomic metals and semiconductors, taking the threshold effect for knock-on of atoms into account in the Sigmund theory. It is found that this semi-empirical formula fits to the energy dependence of the sputtering yields over a wide range of ion-target combinations. The best fit values of the parameters for the formula are given as a function of the ratio of the mass of target atoms and the mass of incident ions.

Backscattering coefficients of H, D, and He ions from solids

Abstract Experimental data on the number-backscattering coefficient R N , the energy-backscattering coefficient R E , and the mean fractional energy r E of backscattered particles are tabulated for H, D, and He ions normally incident on elemental solids. References through 1981 are covered. The dependence of R N and R E on incident energy is shown graphically for energies from about 10 eV to 100 keV by plotting the experimental data and the empirical formulas of Tabata et al. Graphs are provided for 36 elemental targets of atomic numbers from 6 to 92.

Empirical Formulas for the Backscattering of Light Ions from Solids

Empirical formulas have been developed for the backscattering of H, D and He ions normally incident on solid targets. The parameters considered are the number-backscattering coefficient RN, the energy-backscattering coefficient RE and the mean fractional energy rE of backscattered particles (ions and neutrals). The formulation utilizes the fact that the scaling law predicted earlier for RN and RE as a function of the Thomas-Fermi reduced energy e is improved when these parameters are multiplied by St/SeLSS. Here St is the total stopping-power, in which expressions including the Z2-oscillations are used for the electronic stopping-power, and SeLSS is the electronic stopping-power given by the LSS theory when the projectiles are much lighter than the target atoms. The formulas obtained are valid for 10-3\lesssime\lesssim102.