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Featured researches published by Yafan Zhang.


Archive | 2001

A Micormachined Coriolis-Force-Based Mass Flowmeter for Direct Mass Flow and Fluid Density Measurement

Yafan Zhang; Srinivas Tadigadapa; Nader Najafi

This paper reports the design and development of a set of micromachined Coriolis-force-based mass flowmeters for direct mass flow and fluid density measurements. Based on our current prototypes, the flowmeters developed in ISSYS have high resonance frequencies (above 16 KHz) with a high Q-factor of 1000. The flowmeters are able to offer an outstanding mass flow resolution of 2µg/s (0.06 sccm for volumetric airflow), and an excellent fluid density resolution of 2.0mg/cc.


Archive | 2002

Wireless mems capacitive sensor for physiologic parameter measurement

Collin A. Rich; Yafan Zhang; Nader Najafi; Matthew Z. Straayer; Sonbol Massoud-Ansari


Archive | 1999

Micromachined fluidic apparatus

Srinivas Tadigadapa; Chialun Tsai; Yafan Zhang; Nader Najafi


Archive | 2002

Implantable sensing device for physiologic parameter measurement

Collin A. Rich; Yafan Zhang; Nader Najafi


Archive | 1999

Methods for prevention, reduction, and elimination of outgassing and trapped gases in micromachined devices

Nader Najafi; Sonbol Massoud-Ansari; Srinivas Tadigadapa; Yafan Zhang


Archive | 1999

Electrical feedthrough structures for micromachined devices and methods of fabricating the same

Nader Najafi; Yafan Zhang; Terry Hull


Archive | 2002

MEMS capacitive sensor for physiologic parameter measurement

Collin A. Rich; Yafan Zhang; Nadar Najafi


international conference on micro electro mechanical systems | 2001

An ultra-sensitive, high-vacuum absolute capacitive pressure sensor

Yafan Zhang; Sonbol Massoud-Ansari; Guangqing Meng; Woojin Kim; Nader Najafi


Archive | 2002

Method of fabricating a micromachined tube for fluid flow

Srinivas Tadigadapa; Chialun Tsai; Yafan Zhang; Nader Najafi


Archive | 2002

Capteur capacitif de systeme microelectromecanique sans fil permettant de mesurer un parametre physiologique

Collin A. Rich; Matthew Z. Straayer; Yafan Zhang; Nader Najafi; Sonbol Massoud-Ansari

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Srinivas Tadigadapa

Pennsylvania State University

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