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Yamin Ma

Rice University

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Publication

Featured researches published by Yamin Ma.

Archive | 2011

Fine droplet atomizer for liquid precursor vaporization

Benjamin Y. H. Liu; Thuc M. Dinh; Yamin Ma

Archive | 2008

Method and apparatus for particle filtration and enhancing tool performance in film deposition

Benjamin Y.H. Liu; Yamin Ma; Thuc M. Dinh

Archive | 2009

Apparatus for filtration and gas-vapor mixing in thin film deposition

Benjamin Y.H. Liu; Yamin Ma; Thuc M. Dinh

Archive | 2013

Liquid flow control for film deposition

Benjamin Y.H. Liu; Thuc M. Dinh; Yamin Ma

Archive | 2013

Method for vapor condensation and recovery

Benjamin Y. H. Liu; Thuc M. Dinh; Yamin Ma

Archive | 2012

Method and apparatus for vapor and gas filtration

Benjamin Y. H. Liu; Yamin Ma; Thuc M. Dinh

Archive | 2011

Method and apparatus for generating vapor at high rates

Thuc M. Dinh; Yamin Ma; Benjamin Y. H. Liu

Archive | 2011

Integrated system for vapor generation and thin film deposition

Benjamin Y. H. Liu; Yamin Ma; Thuc M. Dinh

Archive | 2016

Apparatus and method for vapor generation and film deposition

Thuc M. Dinh; Yamin Ma; Benjamin Y. H. Liu

Archive | 2014

Method and apparatus for vapor generation and wafer cleaning

Thuc M. Dinh; Yamin Ma; Benjamin Y. H. Liu

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Thuc M. Dinh

Rice University

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Benjamin Y. H. Liu

University of Minnesota

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Benjamin Y.H. Liu

Rice University

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