Yanchao Hou

Influence of deposition temperature on Sm2S3 thin films fabricated by liquid phase deposition method on self-assembled monolayers

Abstract Sm2S3 thin films were prepared on Si (100) substrates using SmCl3 and Na2S2O3 as precursors by a liquid phase deposition process on self-assembled monolayers. The influence of the deposition temperature on the phase composition, surface morphology and optical property of the as deposited films was investigated. Results show that it is important to control the deposition temperature during the deposition process, and well crystallised Sm2S3 thin films with orientation growth along (103) direction can be achieved when the deposition temperature is 80°C. The as deposited thin films exhibit a plate-like morphology and a layer by layer growth. Good transmittance in the visible spectrum and excellent absorbency of ultraviolet light of the thin films are observed. The as deposited thin films also exhibit red photoluminescence (PL) properties under visible light excitation. With increasing temperature in the deposition solution, the PL properties of the as deposited Sm2S3 thin films are obviously improved.