Yanyuan Qi

Controlled Synthesis of Micro/Nano MoO3 by Physical Vapor Deposition and Its Gas Sensing Properties to NH3 Gas at Room Temperature

In the present work, micro/nano MoO3 is prepared by physical vapor deposition method using molybdenum trioxide as a source. It is found that its morphology and structure strongly depend on the heating temperature, quality of MoO3 source, speed of gas flow, and heating rate, which correspond to the concentration of MoO3 vapor and growing temperature. The micro/nano MoO3 is proved to be α-MoO3 and have a good response to NH3 with the response/recovery time of less than 30 s at room temperature. This is because micro/nano MoO3 possesses the large specific surface area and contains abundant oxygen vacancies.