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Dive into the research topics where Yao-En Li is active.

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Featured researches published by Yao-En Li.


Vacuum | 1993

The behavior of moisture in high pressure inert cylinder gases

Yao-En Li; John Rizos; David Vassallo; Matthew Giacobbe

Abstract The moisture concentration inside cylinder gases changes according to the cylinder pressure: at high cylinder pressures, the moisture concentration is undetectable, while the moisture level increases as the cylinder pressure decreases. This phenomenon is traditionally explained by the dilution theory, which predicts a linear relationship between cylinder pressure and moisture concentration. However, experimentally this phenomenon has never been observed. The focus of this talk lies upon the development of a theoretical model describing the moisture interaction with a solid surface at various high cylinder pressures.


Archive | 1996

Process and system for separation and recovery of perfluorocompound gases

Yao-En Li; Joseph E. Paganessi; David Vassallo; Gregory K. Fleming


Archive | 1994

Process for passivating metal surfaces to enhance the stability of gaseous hydride mixtures at low concentration in contact therewith

Yao-En Li; John Rizos; Gerhard Kasper


Archive | 1993

Chemical purification for semiconductor processing by partial condensation

Yao-En Li; John Rizos


Archive | 1991

Process for drying metal surfaces using gaseous hydrides to inhibit moisture adsorption and for removing adsorbed moisture from the metal surfaces

Yao-En Li; John Rizos; Gerhard Kasper


Archive | 1998

An improved process and system for separation and recovery of perfluorocompound gases

Gregory K. Fleming; Yao-En Li; Joseph E. Paganessi; David Vassallo


Archive | 1998

Improved method for separation and recovery of gaseous perfluoro compound and apparatus therefor

Gregory K. Fleming; Yao-En Li; Joseph E. Paganessi; David Vassallo; グレゴリー・ケー・フレミング; ジョーゼフ・パガネッシー; デイビッド・バサロー; − エン・リ ヤオ


Archive | 1998

An improved process for separation and recovery of perfluorocompound gases

Gregory K. Fleming; Yao-En Li; Joseph E. Paganessi; David Vassallo


Archive | 1996

System for separation and recovery of perfluorocompound gases

Gregory K. Fleming; Yao-En Li; Joseph E. Paganessi; David Vassallo


Archive | 1998

Verbessertes Verfahren zur Entfernung sowie Rückgewinnung von gasförmigen Perfluorverbindungen An improved process for the removal and recovery of gaseous perfluorocompounds

Yao-En Li; Joseph E. Paganessi; David Vassallo; Gregory K. Fleming

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