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Yao Hanmin

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Publication

Featured researches published by Yao Hanmin.

Archive | 2002

Projection objective for 0.35 micron photoetching

Chen Xunan; Yao Hanmin; Lin Wumei

Archive | 2001

Optical pre-alighment apparatus for submicron photoetching device

Chen Xunan; Yao Hanmin; Liu Yeyi

Archive | 2005

Method for transversely period doping of semiconductor material and the equipment thereof

Chen Xianzhong; Yao Hanmin; Chen Xunan

Archive | 2005

Method for making nanometer structure by optical operated atom and apparatus thereof

Chen Xianzhong; Yao Hanmin; Chen Xunan

Archive | 2004

Material-saving type atomic beam generator

Chen Xunan; Yao Hanmin; Li Zhan

Archive | 2002

Atomic beam generator

Luo Xiangang; Yao Hanmin; Chen Xu Nan

Archive | 2002

Phase-shifting filter for projecting etching imaging

Chen Xunan; Luo Xiangang; Yao Hanmin

Archive | 2001

Regulating and fixiing structure for submicron photoetching objective lens

Chen Xunan; Yao Hanmin; Wei Quanzhong

Archive | 1999

Phase optical grating off axis illumination optical system for etching machine

Luo Xiangang; Yao Hanmin; Chen Xu Nan

Archive | 1999

Ring optical grid off-axis illuminating optical system for photoetching machine

Luo Xiangang; Yao Hanmin; Chen Xunan

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Collaboration

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Chen Xunan

Chinese Academy of Sciences

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Luo Xiangang

Chinese Academy of Sciences

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Wang Hao

Chinese Academy of Sciences

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