Yasuhiro Nojiri
Toshiba
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Yasuhiro Nojiri.
Japanese Journal of Applied Physics | 2013
Daiki Iino; Yasuhiro Nojiri; Keiji Suzuki; Takumi Oike; Yoshitaka Fujii; Hirotaka Toyoda
The influence of the wafer surface material and wafer bias voltage on the Br radical density in HBr/Ar and HBr/Ar/O2 inductively coupled plasmas was investigated by appearance mass spectrometry. By increasing the bias voltage, a monotonic decrease in the Br radical density was observed irrespective of the surface material (Si, Al2O3) of the wafer. A drastic increase in Br radical density was observed after O2 addition to HBr/Ar plasma in the case of a bare Si wafer, whereas almost the same density was observed in the case of an Al2O3-sputtered Si wafer. X-ray photoelectron spectroscopy (XPS) analysis indicated that O2 addition promotes oxide formation on the Si surface. Measurement of the decay time constant for a Br radical after turning off the plasma indicated that O2 addition results in a longer decay time constant, suggesting the decrease of the surface loss probability of Br radicals for the surface-oxidized Si surface.
Archive | 2008
Hiroyuki Fukumizu; Tsukasa Nakai; Yasuhiro Nojiri; Kenichi Otsuka; Kazuyuki Yahiro; 司 中居; 和之 八尋; 賢一 大塚; 裕之 福水; 康弘 野尻
Archive | 2010
Tsukasa Nakai; Yasuhiro Nojiri; Shuichi Kuboi; Motoya Kishida; Akiko Nomachi; Masanobu Baba; Hiroyuki Fukumizu
Archive | 2011
Yasuhiro Nojiri; Hiroyuki Fukumizu; Shinichi Nakao; Kei Watanabe; Kazuhiko Yamamoto; Ichiro Mizushima; Yoshio Ozawa
Archive | 2010
Tsukasa Nakai; Hiroyuki Fukumizu; Yasuhiro Nojiri; Motoya Kishida; Kazuyuki Yahiro; Yasuhiro Satoh
Archive | 2011
Yasuhiro Nojiri
Archive | 2013
Masaki Yamato; Yasuhiro Nojiri; Shigeki Kobayashi; Hiroyuki Fukumizu; Takeshi Yamaguchi
Archive | 2014
Hideo Eto; Yasuhiro Nojiri; Makoto Saito
Archive | 2013
Yasuhiro Nojiri; Shigeki Kobayashi; Masaki Yamato; Hiroyuki Fukumizu
Archive | 2011
Noriko Bota; Yasuhiro Nojiri; Hiroyuki Fukumizu; Takuya Konno; Kazuhito Nishitani