Yasujiro Oshima

Micro-Pattern Positioning by Laser

Abstract In the fabrication of an LSI, it is essential that a pattern being formed on the wafer is accurately aligned with the previous pattern. This paper concerns a method of aligning which requires no special aligning marks, but uses the pattern itself for positioning. Translation deviations are detected by generating the optical autocorrelation function by holographic techniques. Rotational deviation in the plane of the wafer, and inclination of the plane of the wafer, are detected by using the Fraunhofer diffraction image.

Recent Trends of Manufacturing Technology in Japan

Abstract The Japanese industries have the advanced manufacturing technology for thorough rationalization of manufacturing processes. This paper describes the historical background which brought the advancement of the Japanese manufacturing technology and the present status of the manufacturing technology in the automotive industry and the precision industries which are the leading industries in Japan at present. The Kanban system of Toyota Motor Co., automatic assembly and inspection line for watch production developed by the Seiko group and automatic maskaligner of Canon Inc. are explained in more detail. As for automatic machining technology and the automatic material handling technology, the present status of the NC machine tools and the robots is described. With respect to the research and development for the future, the project research of Flexible Manufacturing System Complex Provided with Laser and the VLSI Technology Research Association are introduced.