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Yasumichi Suzuki

Hitachi

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Publication

Featured researches published by Yasumichi Suzuki.

Archive | 1984

Method and apparatus for sputtering

Hiroshi Saito; Hideki Tateishi; Shigeru Kobayashi; Susumu Aiuchi; Yasumichi Suzuki; Masao Sakata; Hideaki Shimamura; Tsuneaki Kamei

Archive | 1994

Method of and apparatus for removing foreign particles

Toru Otsubo; Yasumichi Suzuki; Shinji Sasaki; Kazuhiro Ohara; Ichirou Sasaki

Archive | 1985

Method and apparatus for microwave assisting sputtering

Hiroshi Saito; Yasumichi Suzuki; Shuuzoo Sano; Tamotsu Shimizu; Susumu Aiuchi

Archive | 1988

Apparatus for treating material by using plasma

Hiroshi Saito; Yasumichi Suzuki; Shunji Sasabe; Kazuhiro Nakajima

Archive | 1993

Plasma processing method and an apparatus for carrying out the same

Hiroshi Saito; Yasumichi Suzuki; Naoyuki Tamura

Archive | 1985

Microwave assisting sputtering

Hiroshi Saito; Yasumichi Suzuki; Shuuzoo Sano; Tamotsu Shimizu; Susumu Aiuchi

Archive | 1988

Method and apparatus for treating material by using plasma

Hiroshi Saito; Yasumichi Suzuki; Shunji Sasabe; Kazuhiro Nakajima

Archive | 1994

APPARATUS AND METHOD FOR REMOVING CONTAMINANT

Kazuhiro Ohara; Toru Otsubo; Ichiro Sasaki; Shinji Sasaki; Yasumichi Suzuki; 一郎 佐々木; 新治 佐々木; 和博 大原; 徹 大坪; 康道 鈴木

Archive | 1994

An apparatus for removing foreign particles and the method

Toru Otsubo; Yasumichi Suzuki; Shinji Sasaki; Kazuhiro Ohara; Ichirou Sasaki

Archive | 1988

Procédé et appareil pour traiter un matériau à l'aide de plasma

Hiroshi Saito; Yasumichi Suzuki; Shunji Sasabe; Kazuhiro Nakajima

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Collaboration

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Hiroshi Saito

Hitachi

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Susumu Aiuchi

Hitachi

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Kazuhiro Nakajima

Hitachi

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Shunji Sasabe

Hitachi

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Hideaki Shimamura

Hitachi

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Hideki Tateishi

Hitachi

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Masao Sakata

Hitachi

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Shigeru Kobayashi

Hitachi

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Tsuneaki Kamei

Hitachi

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Kazuhiro Ohara

Hitachi

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