Yasushi Kuroda

High-pressure generation using double stage micro-paired diamond anvils shaped by focused ion beam

Micron-sized diamond anvils with a 3 μm culet were successfully processed using a focused ion beam (FIB) system and the generation of high pressures was confirmed using the double stage diamond anvil cell technique. The difficulty of aligning two second-stage micro-anvils was solved via the paired micro-anvil method. Micro-manufacturing using a FIB system enables us to control anvil shape, process any materials, including nano-polycrystalline diamond and single crystal diamond, and assemble the sample exactly in a very small space between the second-stage anvils. This method is highly reproducible. High pressures over 300 GPa were achieved, and the pressure distribution around the micro-anvil culet was evaluated by using a well-focused synchrotron micro-X-ray beam.

ArF photo resist pattern sample preparation method using FIB without protective coating

This paper presents a novel method of FIB (FIB: focused ion beam) sample preparation to accurately evaluate critical dimensions and profiles of ArF photo resist patterns without the use of a protective coating on the photo resist. In order to accomplish this, the FIB micro-sampling method that is one of effective FIB milling and fabrication method was employed. First a Si cap is picked up from a silicon wafer and fixed to ArF photo resist patterns to protect against ion beam irradiation. Then, a micro-sample, a piece of Si-capped ArF photo resist, was extracted from the bulk ArF photo resist. In this procedure, this silicon cap always protects ArF photo resist patterns against ion beam irradiation. For the next step, the micro-sample is fixed to a needle stub of the FIB-STEM (STEM: scanning transmission electron microscopy) compatible rotation holder. This sample on the needle stub was rotated 180 degrees and milled from the side of Si substrate. Lastly, the sample is milled to the thickness of 2μm. In this process, the ion beam is irradiating from the silicon substrate side to minimize the ion beam irradiation damages on the ArF photo resist patterns. EDX (EDX: Energy dispersive X-ray spectroscopy) analysis proved that no gallium ions were detected on the surface of the ArF photo resist patterns. The feasibility of high accelerating voltage observation of STEM to observe line edge roughness of a thick sample like 2μm without shrinkage has been demonstrated.