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Yasuyuki Yaginuma

East Tennessee State University

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Publication

Featured researches published by Yasuyuki Yaginuma.

Archive | 2000

Synthetic quartz glass member for use in ArF excimer laser lithography

Akira Fujinoki; Takayuki Oshima; Hiroyuki Nishimura; Yasuyuki Yaginuma

Archive | 2000

Optical member of silica glass for transmitting fluorine excimer laser radiation and method for producing the same

Akira Fujinoki; Hiroyuki Nishimura; Yasuyuki Yaginuma; Toru Yokota

Archive | 2001

Synthetic quartz glass optical material and optical member for f2 excimer lasers

Akira Fujinoki; Hiroyuki Nishimura; Toru Yokota; Yasuyuki Yaginuma; Akira Sato; Tetsuji Ueda

Archive | 1999

Optical silica glass member for f2 excimer laser transmission and method for producing the same

Akira Fujinoki; Hiroyuki Nishimura; Yasuyuki Yaginuma; Toru Yokota; 康之 柳沼; 透 横田; 朗 藤ノ木; 裕幸 西村

Archive | 1999

Method for producing synthetic quartz glass for the use in ArF excimer laser lithography

Akira Fujinaki; Hiroyuki Nishimura; Takayuki Oshima; Yasuyuki Yaginuma

Archive | 2001

Synthetic quartz glass

Akira Fujinoki; Kichiken Ikeda; Hiroyuki Nishimura; Akira Sato; Tetsuji Ueda; Yasuyuki Yaginuma; 哲司 上田; 彰 佐藤; 康之 柳沼; 吉謙 池田; 朗 藤ノ木; 裕幸 西村

Archive | 2001

Synthetic quartz glass optical material and optical member

Akira Fujinoki; Hiroyuki Nishimura; Toru Yokota; Yasuyuki Yaginuma; Akira Sato; Tetsuji Ueda

Archive | 2000

Optical material of synthetic quartz glass for f2 excimer laser and optical part

Akira Fujinoki; Hiroyuki Nishimura; Akira Sato; Tetsuji Ueda; Yasuyuki Yaginuma; Toru Yokota; 哲司 上田; 彰 佐藤; 康之 柳沼; 透 横田; 朗 藤ノ木; 裕幸 西村

Archive | 2008

METHOD OF MANUFACTURING SYNTHETIC QUARTZ GLASS MEMBER FOR ArF EXCIMER LASER LITHOGRAPHY

Akira Fujinoki; Hiroyuki Nishimura; Takayuki Oshima; Yasuyuki Yaginuma; 隆之 大嶋; 康之 柳沼; 朗 藤ノ木; 裕幸 西村

Archive | 2000

Bauteil aus synthetischem Quarzglas zur Anwendung in der ArF-Excimerlaser-Lithographie Synthetic quartz glass member for use in ArF excimer laser lithography

Akira Koriyama-shi Fujinoki; Hiroyuki Nishimura; Takayuki Oshima; Yasuyuki Yaginuma

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Collaboration

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Hiroyuki Nishimura

Shin-Etsu Chemical

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Akira Fujinoki

East Tennessee State University

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Takayuki Oshima

East Tennessee State University

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Toru Yokota

East Tennessee State University

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Akira Sato

East Tennessee State University

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Hiroyuki Nishimura

Shin-Etsu Chemical

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Tetsuji Ueda

East Tennessee State University

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Akira Fujinaki

East Tennessee State University

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哲司 上田

Kyushu University

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