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Yeh Chun-Chen

IBM

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Publication

Featured researches published by Yeh Chun-Chen.

Archive | 2017

Method for making semiconductor device with filled gate line end recesses

Liu Qing; Xie Ruilong; Cai Xiuyu; Yeh Chun-Chen; Wang Kejia

Archive | 2015

Verfahren zur Herstellung eines SOI-FinFET mit vertieften verschmolzenen Rippen und Schicht zur verbesserten Spannungskopplung

Bu Huiming; Leobandung Effendi; Standaert Theodorus E; Yeh Chun-Chen; Basker Veeraraghavan S; Yamashita Tenko

Archive | 2017

Low Resistance Source Drain Contact Formation

Gluschenkov Oleg; Liu Zuoguang; Mochizuki Shogo; Niimi Hiroaki; Yeh Chun-Chen

Archive | 2018

CONTROLLING SELF-ALIGNED GATE LENGTH IN VERTICAL TRANSISTOR REPLACEMENT GATE FLOW

Xie Ruilong; Yamashita Tenko; Cheng Kangguo; Yeh Chun-Chen

Archive | 2018

Forming air-gap spacer for vertical field effect transistor

Cheng Kangguo; Xie Ruilong; Yamashita Tenko; Yeh Chun-Chen

Archive | 2018

Formation of VFET and finFET

Cheng Kangguo; Xie Ruilong; Yamashita Tenko; Yeh Chun-Chen

Archive | 2017

Controlling channel length for vertical FETs

Cheng Kangguo; Xie Ruilong; Yamashita Tenko; Yeh Chun-Chen

Archive | 2017

ASPECT RATIO TRAPPING IN CHANNEL LAST PROCESS

Leobandung Effendi; Yeh Chun-Chen

Archive | 2017

DUAL SILICIDE LINER FLOW FOR ENABLING LOW CONTACT RESISTANCE

Adusumilli Praneet; Basker Veeraraghavan S; Liu Zuoguang; Yamashita Tenko; Yeh Chun-Chen

Archive | 2017

TUNNELING FIN TYPE FIELD EFFECT TRANSISTOR WITH EPITAXIAL SOURCE AND DRAIN REGIONS

Basker Veeraraghavan S; Liu Zuoguang; Yamashita Tenko; Yeh Chun-Chen

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Yamashita Tenko

IBM

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Basker Veeraraghavan S

IBM

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Leobandung Effendi

IBM

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Xie Ruilong

GlobalFoundries

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Cai Ming

IBM

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Cheng Kangguo

IBM

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Guo Dechao

IBM

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Liu Zuoguang

IBM

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Bu Huiming

IBM

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Kulkarni Pranita

IBM

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