Yim Bun Patrick Kwan

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Yim Bun Patrick Kwan is active.

Explore More

Publication

Featured researches published by Yim Bun Patrick Kwan.

Archive | 2002

Balanced positioning system for use in lithographic apparatus

Yim Bun Patrick Kwan; Wilhelmus J. T. P. van de Wiel

Archive | 2004

Lithographic apparatus, device manufacturing method and device manufacturing thereby

Yim Bun Patrick Kwan

Archive | 2001

LITHOGRAPHY PROJECTION APPARATUS

Yim Bun Patrick Kwan; ブンパトリッククワンイイム

Archive | 2003

Positioning system for use in lithographic apparatus

Yim Bun Patrick Kwan; Serge Felix Chretien Lucien Wetzels; Gerjan Peter Veldhuis

Archive | 2000

Purge gas systems for use in lithographic projection apparatus

Raymond Laurentius Johannes Schrijver; Tjarko Adriaan Rudolf Van Empel; Marcel Koenraad Marie Baggen; Bernardus Antonius Johannes Luttikhuis; Yim Bun Patrick Kwan; Erik Roelof Loopstra

Archive | 2001

Cooling of voice coil motors in lithographic projection apparatus

Edwin Johan Buis; Noud Jan Gilissen; Yim Bun Patrick Kwan; Paulus Hendricus C Maria Schapendonk

Archive | 2001

Method for calibrating a lithographic projection apparatus and apparatus capable of applying such a method

Yim Bun Patrick Kwan; Leon Martin Levasier

Archive | 2001

Lithographic projection apparatus having a temperature controlled heat shield

Erik Roelof Loopstra; Yim Bun Patrick Kwan; Marcel Johannus Elisa Muitjens; Sonja Theodora De. Vrieze-voorn

Archive | 2000

Lithographic projection apparatus with collision preventing device

Andreas Bernardus Gerardus Ariens; Edwin Johan Buis; Jan Frederik Hoogkamp; Yim Bun Patrick Kwan; Schmidt Robert-Han Munnig; De Pasch Engelbertus Antonius Fransiscus Van

Archive | 2000

Lithographic apparatus with a balanced positioning system

Yim Bun Patrick Kwan; De Wiel Wilhelmus Theodorus Petrus Van

Explore More

Collaboration

Dive into the Yim Bun Patrick Kwan's collaboration.

Explore More

ASML Holding

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot

Dive into the research topics where Yim Bun Patrick Kwan is active.

Publication

Featured researches published by Yim Bun Patrick Kwan.

Balanced positioning system for use in lithographic apparatus

Lithographic apparatus, device manufacturing method and device manufacturing thereby

LITHOGRAPHY PROJECTION APPARATUS

Positioning system for use in lithographic apparatus

Purge gas systems for use in lithographic projection apparatus

Cooling of voice coil motors in lithographic projection apparatus

Method for calibrating a lithographic projection apparatus and apparatus capable of applying such a method

Lithographic projection apparatus having a temperature controlled heat shield

Lithographic projection apparatus with collision preventing device

Lithographic apparatus with a balanced positioning system

Collaboration

Dive into the Yim Bun Patrick Kwan's collaboration.