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Dive into the research topics where Yizhen Lin is active.

Publication


Featured researches published by Yizhen Lin.


Archive | 2009

Laterally integrated MEMS sensor device with multi-stimulus sensing

Andrew C. McNeil; Yizhen Lin; Woo Tae Park


Archive | 2007

Symmetrical differential capacitive sensor and method of making same

Yizhen Lin; Marco Fuhrmann; Andrew C. McNeil


Archive | 2010

VERTICALLY INTEGRATED MEMS ACCELERATION TRANSDUCER

Yizhen Lin; Todd F. Miller; Woo Tae Park


Archive | 2008

Transducer with decoupled sensing in mutually orthogonal directions

Yizhen Lin; Andrew C. McNeil


Archive | 2007

Differential capacitive sensor and method of making same

Andrew C. McNeil; Yizhen Lin; Todd F. Miller


Archive | 2013

Pressure level adjustment in a cavity of a semiconductor die

Yizhen Lin; Chad S. Dawson; Hemant D. Desai; Lisa H. Karlin; Keith L. Kraver; Mark E. Schlarmann


Archive | 2012

MEMS device with central anchor for stress isolation

Yizhen Lin; Gary G. Li; Andrew C. McNeil; Todd F. Miller; Lisa Z. Zhang


Archive | 2008

capacitive sensor with stress relief that compensates for package stress

Yizhen Lin; Andrew C. McNeil


Archive | 2011

Inertial sensor with off-axis spring system

Gary G. Li; Yizhen Lin; Andrew C. McNeil; Lisa Z. Zhang


Archive | 2012

Mems device having variable gap width and method of manufacture

Andrew C. McNeil; Yizhen Lin; Lisa Z. Zhang

Collaboration


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Gary G. Li

Freescale Semiconductor

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Woo Tae Park

Freescale Semiconductor

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