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Yoda Haruo

Hitachi

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Publication

Featured researches published by Yoda Haruo.

Archive | 1972

Inspection equipment for detecting and extracting small portion included in pattern

Ejiri Masakazu; Ikeda Sadahiro; Mese Michihiro; Uno Takeshi; Yoda Haruo

Archive | 1999

IMAGE PROCESSOR PROVIDED WITH CONTRAST IMPROVING FUNCTION AND CHARGED PARTICLE RAY DEVICE

Takane Atsushi; Sato Norio; Nakanishi Kunio; Shibukawa Shigeru; Yoda Haruo

Archive | 2008

Charged particle beam drawing method, aligner, and process for fabricating device

Muraki Masato; Yoda Haruo

Archive | 1999

CHARGED PARTICLE BEAM DEVICE WITH PARALLEL IMAGE PROCESSOR

Takane Atsushi; Yoda Haruo; Shibukawa Shigeru; Yasukochi Masaya; Ikeda Koji

Archive | 1989

PATTERN CHECKING METHOD

Ouchi Yozo; Yoda Haruo; Sako Yutaka; Inai Hidenori

Archive | 1998

LENGTH-MEASURING APPARATUS USING LOW ACCELERATION ELECTRON BEAM

Sako Yutaka; Yoda Haruo; Ouchi Yozo; Inai Hidenori

Archive | 1988

IMAGE MEASURING AND INSPECTING APPARATUS FOR ELECTRON MICROSCOPE

Yoda Haruo; Sako Yutaka; Inai Hidenori; Ouchi Yozo

Archive | 2007

ELECTRON BEAM DEVICE AND METHOD FOR CREATING ELECTRON BEAM IRRADIATION PATTERN

Fujita Makoto; Yoda Haruo; Ando Masaaki; Inoue Yuji; Muraki Masato

Archive | 2000

LUMINANCE CORRECTED IMAGE DISPLAY DEVICE

Sato Norio; Takane Atsushi; Nakanishi Kunio; Shibukawa Shigeru; Yoda Haruo

Archive | 1995

LINE-WIDTH MEASURING METHOD

Sako Yutaka; Yoda Haruo; Ouchi Yozo; Inai Hidenori

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Collaboration

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Shibukawa Shigeru

Hitachi

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Ejiri Masakazu

Hitachi

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Ikeda Sadahiro

Hitachi

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Kashioka Seiji

Hitachi

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Mese Michihiro

Hitachi

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Hotta Takashi

Hitachi

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Ikeda Mitsuji

Hitachi

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Katsura Koyo

Hitachi

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Matsushima Hitoshi

Hitachi

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Miyatake Takafumi

Hitachi

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