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Yokoi Shigeru

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Publication

Featured researches published by Yokoi Shigeru.

Archive | 2002

PHOTORESIST REMOVING SOLUTION

Yokoi Shigeru; Wakiya Kazumasa

Archive | 2006

PHOTORESIST STRIPPING LIQUID

Kumazawa Akira; Ohashi Takuya; Haraguchi Takayuki; Yokoi Shigeru; Wakiya Kazumasa

Archive | 2002

Coating liquid composition for formation of antireflection film, photoresist laminate by using the same, and method for forming photoresist pattern

Wakiya Kazumasa; Kubota Naotaka; Yokoi Shigeru; Haraguchi Takayuki

Archive | 2005

STRIPPER/CLEANER, METHOD OF CLEANING SEMICONDUCTOR SUBSTRATE AND METHOD OF FORMING METAL WIRING USING STRIPPER/CLEANER

Haraguchi Takayuki; Yokoi Shigeru; Wakiya Kazumasa

Archive | 2006

CLEANING LIQUID FOR PHOTOLITHOGRAPHY AND METHOD OF PROCESSING SUBSTRATE USING SAME

Kumazawa Akira; Haraguchi Takayuki; Yokoi Shigeru; Wakiya Kazumasa

Archive | 2006

PHOTORESIST REMOVER AND METHOD FOR TREATMENT OF BOARD USING SAME

Yokoi Shigeru; Haraguchi Takayuki; Wakiya Kazumasa; Kumazawa Akira

Archive | 2006

REMOVER FOR MULTISTAGE PROCESSING, AND STRIPPING METHOD OF ETCHING RESIDUE USING THE SAME

Haraguchi Takayuki; Wakiya Kazumasa; Yokoi Shigeru; Koshiyama Atsushi

Archive | 2003

PHOTORESIST STRIPPING SOLUTION AND STRIPPING METHOD OF PHOTORESIST USING THE SOLUTION

Yokoi Shigeru; Wakiya Kazumasa

Archive | 2003

PHOTO-LITHOGRAPHIC CLEANING SOLUTION AND PROCESS FOR TREATMENT OF SUBSTRATE USING THE SAME

Yokoi Shigeru; Wakiya Kazumasa; Saito Koji

Archive | 2013

SILICON ANISOTROPIC ETCHING METHOD

Shirai Yuriko; Kumazawa Akira; Yokoi Shigeru; Kumagai Tomoya

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