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Yokouchi Hisatake

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Publication

Featured researches published by Yokouchi Hisatake.

Archive | 1982

DRAWING DATA PROCESSING SYSTEM FOR ELECTRON BEAM EXPOSURE APPARATUS

Shimazu Nobuo; Fujinami Akihira; Takamoto Kiichi; Yoda Haruo; Yokouchi Hisatake

Archive | 1985

METHOD OF AUTOMATICALLY CONTROLLING FOCUS IN ELECTRON RAY DEVICE

Yokouchi Hisatake; Matsuoka Genya; Okumura Masahide; Ozasa Susumu; Takamoto Kiichi; Ookubo Tsuneo

Archive | 1983

MARK POSITION DETECTING METHOD FOR ELECTRONIC BEAM EXPOSING DEVICE

Yokouchi Hisatake; Okumura Masahide; Matsuoka Genya; Komoda Tsutomu; Ozasa Susumu; Matsuda Korehito; Ookubo Tsuneo

Archive | 1982

ALIGNMENT MARK DETECTOR FOR ELECTRON BEAM EXPOSURE

Matsuda Korehito; Shimazu Nobuo; Takamoto Kiichi; Ozasa Susumu; Yokouchi Hisatake

Archive | 1979

PATTERN INSPECTING EQUIPMENT

Yokouchi Hisatake; Katou Yasuo; Nonaka Mamoru

Archive | 1979

TEST EQUIPMENT FOR BRAUN TUBE PANEL

Yokouchi Hisatake; Nonaka Mamoru

Archive | 1985

MARK DETECTION SYSTEM

Ozasa Susumu; Okumura Masahide; Yokouchi Hisatake; Takamoto Kiichi; Matsuda Korehito

Archive | 1984

MEASUREMENT OF BEAM SHAPE IN ELECTRON BEAM EXPOSING APPARATUS

Matsuoka Genya; Yokouchi Hisatake; Ozasa Susumu

Archive | 1983

MARK DETECTOR OF ELECTRONIC BEAM EXPOSURE DEVICE

Yokouchi Hisatake; Okumura Masahide; Ozasa Susumu; Matsuda Korehito; Ookubo Tsuneo

Archive | 1982

DETECTING METHOD FOR POSITION OF MARK IN ELECTRON-RAY EXPOSING DEVICE

Yokouchi Hisatake; Ozasa Susumu; Matsuda Korehito; Moriya Shigeru

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