Yongfeng Lu

The effects of thermal annealing on ZnO thin films grown by pulsed laser deposition

ZnO thin films were grown on silicon (100) by pulsed laser deposition. Highly textured crystalline ZnO thin films can be grown at 600 °C. The films were then annealed at 600 °C in oxygen. The effects of annealing on chemical composition of the ZnO films were investigated by x-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. The XPS spectra indicate that water has been adsorbed and then dissociated into H and OH groups. The surface properties of ZnO were studied both by scanning tunneling microscopy and scanning tunneling spectroscopy (STS). A narrow potential well has been formed on the surface of the ZnO thin films due to high density of surface states and negatively biasing the ZnO thin films during STS measurement. The discrete energy levels can be measured by STS.

A high performance MIM capacitor using HfO 2 dielectrics

Metal-insulator-metal (MIM) capacitors with a 56 nm thick HfO/sub 2/ high-/spl kappa/ dielectric film have been fabricated and demonstrated for the first of time with a low thermal budget (/spl sim/200/spl deg/C). Voltage linearity, temperature coefficients of capacitance, and electrical properties are all characterized. The results show that the HfO/sub 2/ MIM capacitor can provide a higher capacitance density than Si/sub 3/N/sub 4/ MIM capacitor while still maintaining comparable voltage and temperature coefficients of capacitance. In addition, a low leakage current of 2/spl times/10/sup -9/ A/cm/sup 2/ at 3 V is achieved. All of these make the HfO/sub 2/ MIM capacitor to be very suitable for use in silicon RF and mixed signal IC applications.

Optical fiber refractometer based on cladding-mode Bragg grating

We demonstrate an optical fiber refractometer based on a cladding-mode Bragg grating. It consists of a long-period grating (LPG) followed by a fiber Bragg grating (FBG). The LPG partially couples light from the core mode to a cladding mode, both of which are reflected by the FBG. Part of the cladding mode reflection is coupled back to the core mode through the original LPG and used for refractive index sensing. The core mode reflection is used to compensate for the temperature cross sensitivity of the refractometer. The sensors operate in the reflection mode and can be multiplexed on a fiber in wavelength domain.

Annealing and oxidation of silicon oxide films prepared by plasma-enhanced chemical vapor deposition

We have investigated phase separation, silicon nanocrystal (Si NC) formation and optical properties of Si oxide (SiOx, 0<x<2) films by high-vacuum annealing and dry oxidation. The SiOx films were deposited by plasma-enhanced chemical vapor deposition at different nitrous–oxide/silane flow ratios. The physical and optical properties of the SiOx films were studied as a result of high-vacuum annealing and thermal oxidation. X-ray photoelectron spectroscopy (XPS) reveals that the as-deposited films have a random-bonding or continuous-random-network structure with different oxidation states. After annealing at temperatures above 1000 °C, the intermediate Si continuum in XPS spectra (referring to the suboxide) split to Si peaks corresponding to SiO2 and elemental Si. This change indicates the phase separation of the SiOx into more stable SiO2 and Si clusters. Raman, high-resolution transmission electron microscopy and optical absorption confirmed the phase separation and the formation of Si NCs in the films. Th...

Pulsed laser-assisted surface structuring with optical near-field enhanced effects

The effects of optical resonance and near field in the interaction of transparent particles on a substrate with laser light have been examined experimentally and theoretically. It is found that pits can be created at the contacting point between the particle and the metallic surface by laser irradiation (KrF,λ=248 nm) with a single pulse. The influence of the particle size and the laser fluence on the structuring of the surface has been investigated. The size of the particle ranges from 1.0 μm to 140 nm in diameter. The morphologies of the holes created have been characterized by an atomic force microscope and a scanning electron microscope. For constant laser fluence, the created hole is sensitive to the particle size. For higher-laser fluence, the corresponding hole becomes larger and deeper. With a low fluence of 300 mJ/cm2 and for 140 nm particles, the lateral dimensions of created pits can be down to 30 nm. With a high fluence of 750 mJ/cm2 and 1.0 μm particles, the diameter and the depth of created ...

Enhanced Raman scattering by self-assembled silica spherical microparticles

A technique was developed to achieve enhanced Raman scattering of the silicon photon modes using closely packed micro- and submicron silica spherical particles. Investigation on the particle-size dependence of Raman enhancement revealed that the strongest enhancement occurs when the particle diameter is equal to the spot size of the incident laser beam. Calculations using the OPTIWAVE™ software based on the finite difference time domain algorithm under the perfectly matched layer boundary conditions were carried out. The results showed that photonic nanojets are formed in the vicinity outside the particles along the propagation direction of incident light. It was found that the nanojets are confined to a length of 100nm with a waist of 120nm. The presence of the strongly localized electromagnetic fields within the nanojets accounts for the enhanced Raman scattering. This technique has potential applications both in modern and traditional areas of surface science such as surface oxidation, adhesion, corros...

Highly efficient and recyclable carbon soot sponge for oil cleanup.

Carbon soot (CS) has the advantages of cost-effectiveness and production scalability over other carbons (i.e., graphene, CNTs) in their synthesis. However, little research has been conducted to explore the potential applications of CS. In this study, we demonstrated that a common daily waste-CS-can be used for developing a cost-effective absorbent (CS-sponge) to remove oil contaminants from water. The CS was synthesized by an ethylene-oxygen combustion flame. The CS-sponge was prepared via a dip-coating method. Without further surface modification and pretreatments, the CS-sponge demonstrates high absorption capacities (up to 80 times its own weight) for a broad spectrum of oils and organic solvents with a recyclability of more than 10 times. These research results show evidence that the CS-sponge is promising in environmental remediation for large-scale, low-cost removal of oils from water.

Fast growth of graphene patterns by laser direct writing

Rapid single-step fabrication of graphene patterns was developed using laser-induced chemical vapor deposition (LCVD). A laser beam irradiates a thin nickel foil in a CH4 and H2 environment to induce a local temperature rise, thereby allowing the direct writing of graphene patterns in precisely controlled positions at room temperature. Line patterns can be achieved with a single scan without pre- or postprocesses. Surprisingly, the growth rate is several thousand times faster than that of general CVD methods. The discovery and development of the LCVD growth process provide a route for the rapid fabrication of graphene patterns for various applications.

High sensitivity of taper-based Mach–Zehnder interferometer embedded in a thinned optical fiber for refractive index sensing

A taper-based Mach-Zehnder interferometer (MZI) embedded in a thinned optical fiber is demonstrated as a highly sensitive refractive index (RI) sensor. A RI sensitivity of 2210.84 nm/RIU (refractive index unit) is obtained at the external RI of 1.40, which is ten times higher than that of normal taper- and long-period fiber grating (LPFG)-based sensors. The sensitivity can be further improved by decreasing the diameter of the thinned fiber and increasing the interferometer length of the MZI. The proposed MZIs have lower temperature sensitivities compared with normal fiber sensors, which is a desirable merit for RI sensors to reduce the cross sensitivity caused by thermal drift.

Dry laser cleaning of particles from solid substrates: Experiments and theory

The experimental analysis of dry laser cleaning efficiency is done for certified spherical particle (SiO2, 5.0, 2.5, 1.0, and 0.5 μm) from different substrates (Si, Ge, and NiP). The influence of different options (laser wavelength, incident angle, substrate properties, i.e., type of material, surface roughness, etc.) on the cleaning efficiency is presented in addition to commonly analyzed options (cleaning efficiency versus laser fluence and particle size). Found laser cleaning efficiency demonstrates a great sensitivity to some of these options (e.g., laser wavelength, angle of incidence, etc.). Partially these effects can be explained within the frame of the microelectronics engineering (MIE) theory of scattering. Other effects (e.g., influence of roughness) can be explained along the more complex line, related to examination of the problem “particle on the surface” beyond the MIE theory. The theory of dry laser cleaning, based on one-dimensional thermal expansion of the substrate, demonstrates a great...