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Yonghui Chen

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Publication

Featured researches published by Yonghui Chen.

Archive | 2008

Transmission aligning mark combination and alignment method of light scribing device

Huanyang Li; Yonghui Chen; Haijun Song; Chang Zhou

Archive | 2008

Asymmetric transmission mark combination and its aligning method

Huanyang Li; Haijun Song; Yonghui Chen; Chang Zhou

Archive | 2008

Transmission aligning mark combination used for mask alignment and mask alignment method thereof

Huanyang Li; Yonghui Chen; Haijun Song; Chang Zhou

Archive | 2008

Lithography device sensor and detection method

Huanyang Li; Yonghui Chen; Haijun Song; Chang Zhou

Archive | 2008

Photolithography equipment detecting device and method

Huanyang Li; Haijun Song; Yonghui Chen; Tianhong Yan; Chang Zhou

Archive | 2010

A transmission control device and its control method

Chang Zhou; Tianhong Yan; Huanyang Li; Yonghui Chen

Archive | 2008

Subsection interleaving aligning mark combined and aligning method thereof

Huanyang Li; Yonghui Chen; Haijun Song; Chang Zhou

Archive | 2008

Optical etching device aligning method and system

Huanyang Li; Yonghui Chen; Chang Zhou; Tianhong Yan

Archive | 2008

Single hole shape mark aligning signal processing method

Huanyang Li; Haijun Song; Yonghui Chen; Tianhong Yan; Chang Zhou

Archive | 2009

Lithographic equipment alignment method

Huanyang Li; Yonghui Chen; Chang Zhou; Tianhong Yan

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Collaboration

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