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Yoshiaki Kito

Nikon

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Publication

Featured researches published by Yoshiaki Kito.

Archive | 2012

Substrate bonding device, substrate holding device, substrate bonding method, substrate holding method, multilayered semiconductor device, and overlapped substrate

Yoshiaki Kito; Hiroshi Shirasu; Masahiro Yoshihashi; Daisuke Yuki; Kazuhiro Suzuki; Isao Sugaya

Archive | 2013

SUBSTRATE BONDING APPARATUS, SUBSTRATE HOLDING APPARATUS, SUBSTRATE BONDING METHOD, SUBSTRATE HOLDING METHOD, MULTILAYERED SEMICONDUCTOR DEVICE, AND MULTILAYERED SUBSTRATE

Yoshiaki Kito; Hiroshi Shirasu; Masahiro Yoshihashi; Daisuke Yuki; Kazuhiro Suzuki; Isao Sugaya

Archive | 2013

SUBSTRATE TREATMENT APPARATUS, DEVICE PRODUCTION SYSTEM, AND DEVICE PRODUCTION METHOD

鈴木 智也; Tomoya Suzuki; 智也 鈴木; 弘樹 小宮山; Hiroki Komiyama; 加藤 正紀; Masanori Kato; 正紀 加藤; 智行 渡辺; Tomoyuki Watanabe; 義昭 鬼頭; Yoshiaki Kito; 正和 堀; 堀 正和; 洋祐 林田; Yosuke Hayashida

Archive | 2011

SUBSTRATE BONDING DEVICE, SUBSTRATE BONDING METHOD, AND METHOD OF MANUFACTURING BONDED SEMICONDUCTOR DEVICE

Yoshiaki Kito; 義昭 鬼頭; Hiroshi Shirasu; 廣 白数; Naohiko Kurata; 尚彦 倉田

Archive | 2010

Substrate laminating device, laminated semiconductor manufacturing method, and laminated semiconductor

Yoshiaki Kito; Hiroshi Shirasu; Isao Sugaya; 廣 白数; 功 菅谷; 義昭 鬼頭

Archive | 2009

Substrate separating device, substrate sticking device, and method for manufacturing laminated semiconductor device

Yoshiaki Kito; Masahiro Yoshihashi; 正博 吉橋; 義昭 鬼頭

The Journal of The Institute of Image Information and Television Engineers | 2017

Direct Imaging Exposure Equipment with High Overlay Accuracy for Flexible Substrate in Roll-to-Roll Method

Yoshiaki Kito; Yosuke Hayashida; Tomonari Suzuki; Hiroki Komiyama; Tomoyuki Watanabe; Takahiro Kurashige; Masaki Kato; Kei Nara

Archive | 2017

Exposure apparatus, device manufacturing system utilizing the same, device manufacturing method, and pattern exposure method

Masaki Kato; Tomonari Suzuki; Yoshiaki Kito; Yosuke Hayashida; Toru Kiuchi

Journal of The Society for Information Display | 2017

Direct imaging exposure equipment with high overlay accuracy for flexible substrate in roll-to-roll method: Direct imaging exposure equipment

Yoshiaki Kito; Yosuke Hayashida; Tomonari Suzuki; Hiroki Komiyama; Tomoyuki Watanabe; Takahiro Kurashige; Masaki Kato; Kei Nara

The Japan Society of Applied Physics | 2016

Development of the photosensitive surfaces, and the resist-free fine wiring forming technique using an electro less plating.

Yusuke Kawakami; Shohei Koizumi; Yosuke Hayashida; Yoshiaki Kito

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Yosuke Hayashida

Nikon

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Hiroshi Shirasu

Nikon

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Masaki Kato

Nikon

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Tomonari Suzuki

Nikon

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Kei Nara

Nikon

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Tomoyuki Watanabe

Nikon

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Daisuke Yuki

Nikon

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Hiroki Komiyama

Nikon

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Isao Sugaya

Nikon

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Masahiro Yoshihashi

Nikon

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