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Yoshiaki Tatsumi

Sony Broadcast & Professional Research Laboratories

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Archive | 1997

Wafer stage for manufacturing a semiconductor device

Shingo Kadomura; Tomohide Jozaki; Shinsuke Hirano; Kinya Miyashita; Yoshiaki Tatsumi; Seiichirou Miyata

Archive | 1997

Static electricity chuck and wafer stage

Shingo Kadomura; Tomohide Jozaki; Shinsuke Hirano; Kinya Miyashita; Seiichirou Miyata; Yoshiaki Tatsumi

Archive | 2001

Electrostatic chucking device and manufacturing method thereof

Yoshiaki Tatsumi; Kinya Miyashita

Archive | 2006

Apparatus for removing foreign material from substrate and method for removing foreign material from substrate

Riichiro Harano; Yoshiaki Tatsumi; Kinya Miyashita; Hiroshi Fujisawa

Archive | 1994

PARALLEL-PLATE TYPE DRY ETCHING DEVICE

Kazuyuki Hayashi; Kinya Miyashita; Yoshiaki Tatsumi; 欣也宮下; 和行林; 良昭辰巳

Archive | 2009

Two-sided attraction structure, exhibiting or indicating apparatus using same, dust collecting apparatus, and plant growing apparatus

Yoshiaki Tatsumi; Hiroshi Fujisawa; Megumu Kawae

Archive | 2008

Substrate suction apparatus and method for manufacturing the same

Yoshiaki Tatsumi; Kinya Miyashita

Archive | 1993

Method of using a shaping mold for making ultra-thin shaped rubber articles

Tomoyuki Hayashi; Yoshiaki Tatsumi; Kinya Miyashita

Archive | 2010

ELECTROSTATIC ATTRACTING STRUCTURE AND FABRICATING METHOD THEREFOR

Hiroshi Fujisawa; Megumu Kawae; Yoshiaki Tatsumi

Archive | 2016

Particle collector system and dust collection method

Yoshiaki Tatsumi; Yu Saito; Toshifumi Sugawara

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