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Yoshiharu Fukasawa

Toshiba

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Publication

Featured researches published by Yoshiharu Fukasawa.

Archive | 1988

Sputtering alloy target and method of producing an alloy film

Yoshiharu Fukasawa; Mituo Kawai; Hideo Ishihara; Takenori Umeki; Yasuhisa Oana

Archive | 1984

Molybdenum board and process of manufacturing the same

Yoshiharu Fukasawa; Tatsuhiko Matsumoto; Mituo Kawai; Shigeru Ueda; Hideo Koizumi; Hiroyuki Saitou

Archive | 1994

Mo-W material for formation of wiring, Mo-W target and method for production thereof, and Mo-W wiring thin film

Yasuo Kohsaka; Yoshiharu Fukasawa; Yoshiko Tsuji; Mitsushi Ikeda; Michio Sato; Toshihiro Maki

Archive | 1994

Molybdenum-tungsten material for wiring, molybdenum-tungsten target for wiring, process for producing the same, and molybdenum-tungsten wiring thin film

Yasuo Kohsaka; Yoshiharu Fukasawa; Yoshiko Tsuji; Mitsushi Ikeda; Michio Sato; Toshihiro Maki

Archive | 1988

Mo-Ta or W-Ta Sputtering target

Yoshiharu Fukasawa; Mituo Kawai; Hideo Ishihara; Takenori Umeki; Yasuhisa Oana

Archive | 2001

Refractory metal silicide target, method of manufacturing the target, refractory metal silicide thin film, and semiconductor device

Michio Sato; Takashi Yamanobe; Tohru Komatsu; Yoshiharu Fukasawa; Noriaki Yagi; Toshihiro Maki; Hiromi Shizu

Archive | 1994

High melting point metallic silicide target and method for producing the same, high melting point metallic silicide film and semiconductor device

Michio Sato; Takashi Yamanobe; Tohru Komatsu; Yoshiharu Fukasawa; Noriaki Yagi; Toshihiro Maki; Hiromi Shizu

Archive | 1994

Verfahren zur herstellung eines hochschmelzenden metallischen silizidtargets Process for the preparation of a refractory metal silizidtargets

Michio Sato; Takashi Yamanobe; Tohru Komatsu; Yoshiharu Fukasawa; Noriaki Yagi; Toshihiro Maki; Hiromi Shizu

Archive | 1994

Molybdän-wolfram-material zum verdrahten, molybdän-wolfram-target zum verdrahten, verfahren zu deren herstellung und dünne molybdän-wolfram verdrahtung To be wired molybdenum-tungsten-material, molybdenum-tungsten-target to be wired, process for their production and thin molybdenum-tungsten wiring

Yasuo Kohsaka; Yoshiharu Fukasawa; Yoshiko Tsuji; Mitsushi Ikeda; Michio Sato; Toshihiro Maki

Archive | 1994

Verfahren zur herstellung eines hochschmelzenden metallischen silizidtargets A process for making a refractory metal silicide

Michio Sato; Takashi Yamanobe; Tohru Komatsu; Yoshiharu Fukasawa; Noriaki Yagi; Toshihiro Maki; Hiromi Shizu

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Michio Sato

Toshiba

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Toshihiro Maki

Toshiba

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Hideo Ishihara

Toshiba

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Hiromi Shizu

Toshiba

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Mituo Kawai

Toshiba

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Noriaki Yagi

Toshiba

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Takashi Yamanobe

Toshiba

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Tohru Komatsu

Toshiba

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Mitsushi Ikeda

Toshiba

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Takenori Umeki

Toshiba

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