Yoshihiro Higashi

Highly sensitive spintronic strain-gauge sensor based on a MgO magnetic tunnel junction with an amorphous CoFeB sensing layer

We investigated spintronic strain-gauge sensors (Spin-SGSs) based on magnetic tunnel junctions (MTJs). To enhance the strain sensitivity of Spin-SGSs, which is defined as the gauge factor = (ΔR/R)/Δe, we investigated MgO-MTJs with an amorphous CoFeB sensing layer that exhibits high magnetostriction and soft magnetic properties. To maintain the amorphous structure of the CoFeB sensing layer even after post annealing, we applied a MgO capping layer (MgO-cap) to the CoFeB sensing layer and compared it with a Ta capping layer (Ta-cap). After post annealing at 320 °C, the CoFeB sensing layer with a MgO-cap maintained a low coercivity of 3 Oe, whereas that with a Ta-cap exhibited a high coercivity of 25 Oe. Microstructure analysis revealed that the CoFeB sensing layer with the MgO-cap has an amorphous structure because boron remains in the CoFeB sensing layer even after post annealing. The gauge factor for the Spin-SGS with the MgO-cap was 4016, which was four times larger than 942 for the Spin-SGS with the Ta-cap.

Spin-MEMS microphone based on highly sensitive spintronic strain-gauge sensors

We report a novel spintronic MEMS (Spin-MEMS) microphone, which is a new type of resistive microphone. For this microphone, spintronic strain-gauge sensors (Spin-SGSs) are integrated on a bulk micromachined diaphragm. The Spin-SGSs are based on magnetic tunnel junctions (MTJs) similar to those used as magnetic sensors in hard disk drives. In work to date, we have experimentally confirmed that the Spin-SGS exhibits a high gauge factor in excess of 5000, which is 100-fold that for a conventional poly-Si piezoresistor, by adopting a novel amorphous Fe-B-based sensing layer with high magnetostriction and low coercivity. Thanks to the high strain sensitivity of the Spin-SGSs, the Spin-MEMS microphone exhibits a signal-to-noise ratio (SNR) of 57 dB(A). A Spin-MEMS microphone with a first resonance frequency of over 70 kHz was also fabricated that exhibits an SNR of 49 dB(A), which is promising for acoustic health monitoring. In this study, we compared the operation sounds of defective and normal bearings using the Spin-MEMS microphone. The Spin-MEMS microphone detected differences in the operation sounds between the defective and normal bearings in the high-frequency range of 10 kHz to 50 kHz.We report a novel spintronic MEMS (Spin-MEMS) microphone, which is a new type of resistive microphone. For this microphone, spintronic strain-gauge sensors (Spin-SGSs) are integrated on a bulk micromachined diaphragm. The Spin-SGSs are based on magnetic tunnel junctions (MTJs) similar to those used as magnetic sensors in hard disk drives. In work to date, we have experimentally confirmed that the Spin-SGS exhibits a high gauge factor in excess of 5000, which is 100-fold that for a conventional poly-Si piezoresistor, by adopting a novel amorphous Fe-B-based sensing layer with high magnetostriction and low coercivity. Thanks to the high strain sensitivity of the Spin-SGSs, the Spin-MEMS microphone exhibits a signal-to-noise ratio (SNR) of 57 dB(A). A Spin-MEMS microphone with a first resonance frequency of over 70 kHz was also fabricated that exhibits an SNR of 49 dB(A), which is promising for acoustic health monitoring. In this study, we compared the operation sounds of defective and normal bearings using ...

Spin-MEMS microphone integrating a series of magnetic tunnel junctions on a rectangular diaphragm

We investigate the enhancement of the signal-to-noise ratio (SNR) of spintronic micro-electro mechanical-system (Spin-MEMS) microphones in which spintronic strain-gauge sensors (Spin-SGSs) are integrated on a micro-electro mechanical-system (MEMS) diaphragm by using a large array of N Spin-SGSs connected in series similar to that in a previous report on magnetic tunnel junction magnetic sensors. Since the strain-gauge properties of Spin-SGSs strongly depend on the angle between the applied uniaxial strain and the magnetization direction of the reference layer, in order to obtain the same signals from each Spin-SGS in an array, it is necessary to locate the Spin-SGS array in a region where the uniaxial strain occurs uniformly on the MEMS diaphragm. We theoretically and experimentally investigate the effect of the diaphragm shape on uniaxial strain on the diaphragm surface. As a result, it is found that a rectangular-shaped diaphragm provides a larger region in which a uniform uniaxial strain is applied to the Spin-SGS array compared with the generic circular diaphragm. Finally, an SNR enhancement of 18 dB by connecting N = 62 Spin-SGSs in series is successfully confirmed in a Spin-MEMS microphone with a rectangular diaphragm.We investigate the enhancement of the signal-to-noise ratio (SNR) of spintronic micro-electro mechanical-system (Spin-MEMS) microphones in which spintronic strain-gauge sensors (Spin-SGSs) are integrated on a micro-electro mechanical-system (MEMS) diaphragm by using a large array of N Spin-SGSs connected in series similar to that in a previous report on magnetic tunnel junction magnetic sensors. Since the strain-gauge properties of Spin-SGSs strongly depend on the angle between the applied uniaxial strain and the magnetization direction of the reference layer, in order to obtain the same signals from each Spin-SGS in an array, it is necessary to locate the Spin-SGS array in a region where the uniaxial strain occurs uniformly on the MEMS diaphragm. We theoretically and experimentally investigate the effect of the diaphragm shape on uniaxial strain on the diaphragm surface. As a result, it is found that a rectangular-shaped diaphragm provides a larger region in which a uniform uniaxial strain is applied to ...