Yoshihito Isokawa

Fine groove milling of microchannel dies Relationship between tool run-out and groove accuracy

Recently, the use of microchannel chips in micro total analysis systems, which can provide savings of natural resources and energy, has attracted attention in the medical field. Generally, the photolithography technology employed in semiconductor manufacturing is used to manufacture microchannel chip dies. However, it involves several processes such as mask fabrication and the application of a photoresist to a substrate, as well as expensive clean room facilities. In light of this, methods to form a fine groove using a micro-endmill are examined. The effects of the tool run-out of a few micrometers on micro-endmilling, as well as on the groove accuracy of a microgroove, are examined.

Grinding of microgrooves in cemented carbide dies Influence of grinding conditions on groove shape accuracy

Recently, owing to the savings of resource and energy, the use of microchannel chips in micro total analysis systems has attracted attention in the medical field. Generally, microchannel chips are composed of plastic or glass. Glass is stronger than plastic in terms of heat and chemical erosion resistance. However, currently, dies for manufacturing glass microchannel chips are not viable because they are composed of cemented carbide. Therefore, in this study, for manufacturing cemented carbide microchannel chip dies, methods for forming a fine groove by grinding using an electrodeposited diamond wheel are examined. The relationships among grinding condition, surface roughness of the groove bottom face, and deviations in groove shape and depth are clarified by the results.

Study on Fine Groove Milling of Microchannel Dies – Tool Bending in Milling of Micro-Grooves

Microchannel chips for use in micro total analysis systems have recently been attracting attention in the medical field. The photolithography technology employed in semiconductor manufacturing is generally used to manufacture microchannel chip dies. However, this technology involves several processes such as mask fabrication and application of a photoresist to a substrate as well as expensive clean room facilities. In light of this, this study examines ways to form a fine groove by using a micro-end mill. The relationship between the cutting conditions and the bending of a micro-end mill were experimentally examined. In addition, we calculated the tilt angle of the tool used in micro-groove milling on the basis of specific cutting force and tool stiffness.