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Publication
Featured researches published by Yoshiji Ohta.
international memory workshop | 2010
Suguru Kawabata; Mitsuru Nakura; Shinobu Yamazaki; Takahiro Shibuya; Yushi Inoue; Junya Onishi; Yoshiaki Tabuchi; Yukio Tamai; Yoshifumi Yaoi; Kazuya Ishihara; Yoshiji Ohta; Hisashi Shima; Hiro Akinaga; Natsuki Fukuda; Hidenao Kurihara; Yoshiaki Yoshida; Yutaka Kokaze; Yutaka Nishioka; Koukou Suu; Kazuya Nakayama; Akio Kitagawa; Shigeo Ohnishi; Nobuyoshi Awaya
This paper presents the process integration and device technology for the Resistance RAM(RRAM) memory array using a CoOx film and a recess structure as a resistor, which is capable of low voltage, high speed and low current operation. The resistance of the CoOx film and its uniformity are strongly dependent on the film quality, which is optimized by controlling the O2 gas flow rate during the film deposition. We demonstrate the basic write and read operation of the 128Kbits memory array by developing the novel process integration technology and optimizing the test algorism.
Archive | 2010
Nobuyoshi Awaya; Yoshiji Ohta; Yoshiaki Tabuchi
Archive | 2012
Takeshi Shiomi; Masaru Nomura; Yoshiji Ohta; Hiroshi Iwata; Koji Takahashi; Katsuhiko Kishimoto
Archive | 2012
Kenji Komiya; Akihide Shibata; Masaru Nomura; Yoshiji Ohta; Hiroshi Iwata
Archive | 2010
Suguru Kawabata; Kazuya Ishihara; Yoshiji Ohta
Archive | 2009
Kazuya Ishihara; Yutaka Ishikawa; Yoshiji Ohta
Archive | 2012
Hiroshi Iwata; Yoshifumi Yaoi; Kenji Komiya; Masaru Nomura; Yoshiji Ohta
Archive | 2012
Masaru Nomura; Yoshifumi Yaoi; Kohichiroh Adachi; Kohtaroh Kataoka; Takeshi Shiomi; Hiroshi Iwata; Yoshiji Ohta
Archive | 2012
Kenji Kimoto; Hiroshi Igarashi; Yoshifumi Yaoi; Kenji Komiya; Masaru Nomura; Yoshiji Ohta; Hiroshi Iwata
Archive | 2009
Yutaka Ishikawa; Kazuya Ishihara; Yoshiji Ohta
Collaboration
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National Institute of Advanced Industrial Science and Technology
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National Institute of Advanced Industrial Science and Technology
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