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Yoshiki Shibano

Hitachi

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Publication

Featured researches published by Yoshiki Shibano.

Archive | 2002

Method and apparatus for treating perfluorocompounds

Shin Tamata; Ri Koukun; Kazuyoshi Irie; Yoshiki Shibano; Shuichi Kanno

Archive | 2000

Method and apparatus for treating perfluorocompound gas

Shuichi Kanno; Hisao Yamashita; Tomohiko Miyamoto; Shin Tamata; Yoshiki Shibano; Takeo Komuro; Tsugihiro Yukitake; Terufumi Kawasaki

Archive | 1998

Supercritical oxidation process and apparatus

Norihide Saho; Hisashi Isogami; Minoru Morita; Yoshiki Shibano

Archive | 1998

Oxidation processing method, and apparatus and process vessel using the method

Hisashi Isogami; Minoru Morita; Norihide Saho; Yoshiki Shibano

Archive | 2002

Apparatus for treating perfluorocompound gas

Shuichi Kanno; Hisao Yamashita; Tomohiko Miyamoto; Shin Tamata; Yoshiki Shibano; Takeo Komuro; Tsugihiro Yukitake; Terufumi Kawasaki

Archive | 2007

PFC GAS TREATMENT METHOD AND APPARATUS

Terufumi Kawasaki; Takeo Komuro; Tomohiko Miyamoto; Yoshiki Shibano; Shuichi Sugano; Shin Tamada; Hisao Yamashita; Tsugita Yukitake; 知彦 宮本; 武勇 小室; 寿生 山下; 照文 河崎; 慎 玉田; 芳樹 芝野; 周一 菅野; 次太 雪竹

Archive | 2000

Method and apparatus for treating perflourocompound gas

Shiuchi Kanno; Hisao Yamashita; Tomohiko Miyamoto; Shin Tamata; Yoshiki Shibano; Takeo Komuro; Tsugihiro Yukitake; Terufumi Kawasaki

Archive | 2001

Verfahren und Vorrichtung zur Beseitigung von Perfluorverbindungen Method and device for removal of Perfluorochemicals

Shin Tamata; Ri Koukun; Kazuyoshi Irie; Yoshiki Shibano; Shuichi Kanno

Archive | 2001

Method and apparatus for the removal of perfluorocompounds

Shin Tamata; Ri Koukun; Kazuyoshi Irie; Yoshiki Shibano; Shuichi Kanno

Archive | 2000

Procédé et dispositif pour le traitement de gaz contenant des composants perfluoros

Shuichi Kanno; Hisao Yamashita; Tomohiko Miyamoto; Shin Tamata; Yoshiki Shibano; Takeo Komuro; Tsugihiro Yukitake; Terufumi Kawasaki

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Collaboration

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Shin Tamata

Hitachi

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Shuichi Kanno

Hitachi

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Hisao Yamashita

Hitachi

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Takeo Komuro

Hitachi

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Terufumi Kawasaki

Hitachi

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Tomohiko Miyamoto

Hitachi

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Tsugihiro Yukitake

Hitachi

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Hisashi Isogami

Hitachi

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Kazuyoshi Irie

Hitachi

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Minoru Morita

Hitachi

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