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Proceedings of SPIE | 2012

Hyper Suprime-Cam

Satoshi Miyazaki; Yutaka Komiyama; Hidehiko Nakaya; Yukiko Kamata; Yoshi Doi; Takashi Hamana; Hiroshi Karoji; Hisanori Furusawa; Satoshi Kawanomoto; Yuki Ishizuka; Kyoji Nariai; Yoko Tanaka; Fumihiro Uraguchi; Yousuke Utsumi; Yoshiyuki Obuchi; Yuki Okura; Masamune Oguri; Tadafumi Takata; Daigo Tomono; Tomio Kurakami; Kazuhito Namikawa; Tomonori Usuda; Hitomi Yamanoi; Tsuyoshi Terai; Hatsue Uekiyo; Yoshihiko Yamada; Michitaro Koike; Hiro Aihara; Yuki Fujimori; Sogo Mineo

Hyper Suprime-Cam (HSC) is an 870 Mega pixel prime focus camera for the 8.2 m Subaru telescope. The wide field corrector delivers sharp image of 0.25 arc-sec FWHM in r-band over the entire 1.5 degree (in diameter) field of view. The collimation of the camera with respect to the optical axis of the primary mirror is realized by hexapod actuators whose mechanical accuracy is few microns. As a result, we expect to have seeing limited image most of the time. Expected median seeing is 0.67 arc-sec FWHM in i-band. The sensor is a p-ch fully depleted CCD of 200 micron thickness (2048 x 4096 15 μm square pixel) and we employ 116 of them to pave the 50 cm focal plane. Minimum interval between exposures is roughly 30 seconds including reading out arrays, transferring data to the control computer and saving them to the hard drive. HSC uniquely features the combination of large primary mirror, wide field of view, sharp image and high sensitivity especially in red. This enables accurate shape measurement of faint galaxies which is critical for planned weak lensing survey to probe the nature of dark energy. The system is being assembled now and will see the first light in August 2012.


Proceedings of SPIE | 2010

Hyper Suprime-Cam: camera design

Yutaka Komiyama; H. Aihara; Hiroki Fujimori; Hisanori Furusawa; Yukiko Kamata; Hiroshi Karoji; Satoshi Kawanomoto; Sogo Mineo; Hironao Miyatake; Satoshi Miyazaki; Hidehiko Nakaya; Kyoji Nariai; Yoshiyuki Obuchi; Yuki Okura; Yoko Tanaka; Tomohisa Uchida; Fumihiro Uraguchi; Yosuke Utsumi; Makoto Endo; Yutaka Ezaki; Toru Matsuda; Yoshinori Miwa; Hideo Yokota; Shiang-Yu Wang; Eric J.-Y. Liaw; Hsin-Yo Chen; Chyi-Fong Chiu; Dun-Zen Jeng

Hyper Suprime-Cam (HSC) is the next generation wide-field imager for the prime focus of Subaru Telescope, which is scheduled to receive its first light in 2011. Combined with a newly built wide-field corrector, HSC covers 1.5 degree diameter field of view with 116 fully-depleted CCDs. In this presentation, we summarize the details of the camera design: the wide-field corrector, the prime focus unit, the CCD dewar and the peripheral devices. The wide-field corrector consists of 5 lenses with lateral shift type doublet ADC element. The novel design guarantees the excellent image quality (D80 <0.3) over the field of view. On the focal plane, 116 CCDs are tiled on the cold plate which is made of Silicon Carbide (SiC) and cooled down to -100 degrees by two pulse tube coolers. The system is supported by the prime focus unit which provides a precise motion of the system to align the wide-field corrector and the CCD dewar to the optical axis of the telescope.


Proceedings of SPIE | 2008

Canon's development status of EUVL technologies

Shigeyuki Uzawa; Hiroyoshi Kubo; Yoshinori Miwa; Toshihiko Tsuji; Hideki Morishima; Kazuhiko Kajiyama; Takayuki Hasegawa

Canon has been developing the EUVL technologies for more than ten years. The current development status of EUVL technologies is presented. The small field exposure tool (SFET) is positioned as a cornerstone of the manufacturing technologies for the EUVL beta tool. LPP source and the DPP source are the most expecting methods for the EUVL beta tools.


Archive | 2006

Imaging optical system and exposure apparatus

Koichi Sentoku; Gaku Takahashi; Hideki Ina; Yoshinori Miwa


Publications of the Astronomical Society of Japan | 2018

Hyper Suprime-Cam: System design and verification of image quality

Satoshi Miyazaki; Yutaka Komiyama; Satoshi Kawanomoto; Yoshiyuki Doi; Hisanori Furusawa; Takashi Hamana; Yusuke Hayashi; Hiroyuki Ikeda; Yukiko Kamata; Hiroshi Karoji; Michitaro Koike; Tomio Kurakami; Shoken M. Miyama; Fumiaki Nakata; Kazuhito Namikawa; Hidehiko Nakaya; Kyoji Nariai; Yoshiyuki Obuchi; Yukie Oishi; Norio Okada; Yuki Okura; Philip J. Tait; Tadafumi Takata; Yoko Tanaka; M. Tanaka; Tsuyoshi Terai; Daigo Tomono; Fumihiro Uraguchi; Tomonori Usuda; Yousuke Utsumi


Archive | 2003

EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD

Yoshinori Miwa


Archive | 2001

Supporting means for optical element, optical system using the same, exposure device, device manufacturing method, and device

Yoshinori Miwa; 良則 三輪


Archive | 2000

Exposure system, method of manufacturing semiconductor device, and maintenance method for semiconductor manufacturing plant and exposure system

Yoshinori Miwa; Eiji Sakamoto; 良則 三輪; 英治 坂本


Archive | 2007

Exposure apparatus and atmosphere replacement method

Kohei Imoto; Yuji Maehara; Yoshinori Miwa; Shinya Mochizuki; 良則 三輪; 浩平 井本; 裕司 前原; 伸也 望月


Archive | 2000

Aligner and method therefor

Yoshinori Miwa; 良則 三輪

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Satoshi Miyazaki

Graduate University for Advanced Studies

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Yutaka Komiyama

Graduate University for Advanced Studies

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Yuki Okura

Brookhaven National Laboratory

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