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Yoshitsugu Abe

Denso

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Publication

Featured researches published by Yoshitsugu Abe.

Sensors and Actuators A-physical | 2004

Fast etching of silicon with a smooth surface in high temperature ranges near the boiling point of KOH solution

Hiroshi Tanaka; Shuichi Yamashita; Yoshitsugu Abe; Mitsuhiro Shikida; Kazuo Sato

Archive | 1997

Fine processing method

Hiroshi Tanaka; Yoshitsugu Abe; Koji Matsumoto; Kazuyuki Inoue

Archive | 1998

Method of etching silicon wafer and silicon wafer

Yoshitsugu Abe; Hiroshi Tanaka; Atsushi Sakaida; Toshihisa Taniguchi; Tsuyoshi Fukada

Archive | 1996

Etching method for silicon substrates and semiconductor sensor

Minekazu Sakai; Tsuyoshi Fukada; Koki Mizuno; Yasutoshi Suzuki; Yoshitsugu Abe; Hiroshi Tanaka; Motoki Ito; Kazuhisa Ikeda; Hiroshi Okada

Sensors and Materials | 2003

Effects of ppb-level metal impurities in aqueous potassium hydroxide solution on the etching of Si{110} and {100}

Hiroshi Tanaka; Yoshitsugu Abe; Kazuyuki Inoue; Mitsuhiro Shikida; Kazuo Sato

Archive | 1999

Electrochemical etching method for silicon substrate having PN junction

Minekazu Sakai; Tsuyoshi Fukada; Yukihiko Tanizawa; Koki Mizuno; Yasutoshi Suzuki; Yoshitsugu Abe; Hiroshi Tanaka; Motoki Ito; Kazuhisa Ikeda; Hiroshi Okada

Archive | 1997

Etchant, etching method using the same, and related etching apparatus

Hiroshi Tanaka; Yoshitsugu Abe; Motoki Ito; Kazuyuki Inoue; Satoru Kosaka

Journal of The Surface Finishing Society of Japan | 2001

Isotropic Etching of n-Si (110) in KOH Solution under Applied Voltage

Shuichi Yamashita; Hiroshi Tanaka; Yoshitsugu Abe; Takeshi Yamauchi; Osamu Takenaka; Kazuyuki Inoue

Journal of The Surface Finishing Society of Japan | 1999

High Temperature Durability of Copper Plated Bump Solder Joint

Keiji Shinyama; Yoshitsugu Abe; Takao Yoneyama; Kazuyuki Inoue

Archive | 1997

Detection of etching amount in wet etching

Yoshitsugu Abe; Hiroshi Tanaka; 浩 田中; ▲よし▼次 阿部

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Collaboration

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Hiroshi Tanaka

Denso

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Kazuyuki Inoue

Toyota

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Motoki Ito

Denso

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Koji Matsumoto

Denso

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Tsuyoshi Fukada

Denso

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Atsushi Sakaida

Denso

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Hiroshi Okada

Denso

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Kazuhisa Ikeda

Denso

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Kazuo Sato

Aichi Institute of Technology

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Koki Mizuno

Denso

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