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Yotaro Hatamura

Ebara Corporation

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Publication

Featured researches published by Yotaro Hatamura.

Archive | 1996

Ultra-fine microfabrication method using an energy beam

Masahiro Hatakeyama; Katsunori Ichiki; Yotaro Hatamura

Archive | 1996

Fabrication method with energy beam

Masahiro Hatakeyama; Katsunori Ichiki; Takao Kato; Yotaro Hatamura; Masayuki Nakao

Archive | 2003

Microfabrication of pattern imprinting

Masahiro Hatakeyama; Katsunori Ichiki; Tohru Satake; Yotaro Hatamura; Masayuki Nakao

Archive | 1996

Micro-processing apparatus and method therefor

Masahiro Hatakeyama; Katsunori Ichiki; Takao Kato; Masaaki Kajiyama; Takashi Tsuzuki; Yotaro Hatamura; Masayuki Nakao

Archive | 1995

Method and apparatus for energy beam machining

Masahiro Hatakeyama; Katsunori Ichiki; Tadasuke Kobata; Masayuki Nakao; Yotaro Hatamura

Archive | 1999

Fabrication method employing and energy beam source

Masahiro Hatakeyama; Katsunori Ichiki; Tadasuke Kobata; Yotaro Hatamura; Masayuki Nakao

Archive | 1998

Fabrication apparatus employing energy beam

Masahiro Hatakeyama; Katsunori Ichiki; Takao Kato; Yotaro Hatamura; Masayuki Nakao

Archive | 1997

Ultra-fine microfabrication method using a fast atomic energy beam

Masahiro Hatakeyama; Katsunori Ichiki; Yotaro Hatamura

Archive | 1995

METHOD AND DEVICE FOR FINE MACHINING

Masaki Hatakeyama; Yotaro Hatamura; Katsunori Ichiki; Takao Kato; Masayuki Nakao; 克則 一木; 政之 中尾; 隆男 加藤; 洋太郎 畑村; 雅規 畠山

Archive | 1998

Forming method of wiring pattern and manufacture of laminated wiring board

Yotaro Hatamura; Shosaku Ishihara; Masayuki Nakao; Bunichi Tagami; 政之 中尾; 文一 田上; 洋太郎 畑村; 昌作 石原

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Collaboration

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Masayuki Nakao

Ebara Corporation

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Katsunori Ichiki

Ebara Corporation

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Masahiro Hatakeyama

Ebara Corporation

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Takao Kato

Ebara Corporation

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Masaaki Kajiyama

Ebara Corporation

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Tadasuke Kobata

Ebara Corporation

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Takashi Tsuzuki

Ebara Corporation

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Akira Uedono

Yokohama City University

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Atsushi Kubono

Shizuoka University

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Hiroshi Morii

University of Tokyo

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