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Yu-Tsung Lai

United Microelectronics Corporation

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Publication

Featured researches published by Yu-Tsung Lai.

Archive | 2007

Cleaning method following opening etch

Chieh-Ju Wang; Jyh-Cherng Yau; Yu-Tsung Lai; Jiunn-Hsiung Liao

Archive | 2006

Semiconductor manufacturing process

Yu-Tsung Lai; Chun-jen Huang; Jyh-Cherng Yau; Jiunn-Hsiung Liao

Archive | 2012

Method of manufacturing dual damascene structure

Chang-Hsiao Lee; Hsin-Yu Chen; Yu-Tsung Lai; Jiunn-Hsiung Liao; Shih-Chun Tsai

Archive | 2010

DAMASCENE INTERCONNECTION STRUCTURE AND DUAL DAMASCENE PROCESS THEREOF

Chun-jen Huang; Yu-Tsung Lai; Jyh-Cherng Yau; Jiunn-Hsiung Liao

Archive | 2008

CLEANING SOLUTION AND SEMICONDCUTOR PROCESS USING THE SAME

Chang-Hsiao Lee; Shih-Fang Tzou; Ming-Da Hsieh; Yu-Tsung Lai; Jyh-Cherng Yau; Jiunn-Hsiung Liao

Archive | 2011

METHOD FOR FORMING DAMASCENE TRENCH STRUCTURE AND APPLICATIONS THEREOF

Ming-Da Hsieh; Yu-Tsung Lai; Jiunn-Hsiung Liao

Archive | 2009

METHOD OF REMOVING POST-ETCH RESIDUES

Chang-Hsiao Lee; Yu-Tsung Lai; Jiunn-Hsiung Liao

Archive | 2010

METHOD FOR FILLING METAL

Chang-Hsiao Lee; Yu-Tsung Lai; Jiunn-Hsiung Liao

Archive | 2010

PATTERNING METHOD AND METHOD FOR FABRICATING DUAL DAMASCENE OPENING

Ming-Da Hsieh; Yu-Tsung Lai; Jiunn-Hsiung Liao

Archive | 2009

METHOD TO CONTROL CRITICAL DIMENSION

Ming-Da Hsieh; Yu-Tsung Lai; Jyh-Cherng Yau; Jiunn-Hsiung Liao

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Collaboration

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Jiunn-Hsiung Liao

United Microelectronics Corporation

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Chang-Hsiao Lee

United Microelectronics Corporation

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Jyh-Cherng Yau

United Microelectronics Corporation

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Ming-Da Hsieh

United Microelectronics Corporation

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Chun-jen Huang

United Microelectronics Corporation

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Chieh-Ju Wang

United Microelectronics Corporation

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Hsin-Yu Chen

United Microelectronics Corporation

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Shih-Chun Tsai

United Microelectronics Corporation

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Shih-Fang Tzou

United Microelectronics Corporation

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