Yuanjun Guo

Highly sensitive room-temperature surface acoustic wave (SAW) ammonia sensors based on Co3O4/SiO2 composite films

Surface acoustic wave (SAW) sensors based on Co3O4/SiO2 composite sensing films for ammonia detection were investigated at room temperature. The Co3O4/SiO2 composite films were deposited onto ST-cut quartz SAW resonators by a sol-gel method. SEM and AFM characterizations showed that the films had porous structures. The existence of SiO2 was found to enhance the ammonia sensing property of the sensor significantly. The sensor based on a Co3O4/SiO2 composite film, with 50% Co3O4 loading, which had the highest RMS value (3.72), showed the best sensing property. It exhibited a positive frequency shift of 3500 Hz to 1 ppm ammonia as well as excellent selectivity, stability and reproducibility at room temperature. Moreover, a 37% decrease in the conductance of the composite film as well as a positive frequency shift of 12,500 Hz were observed when the sensor was exposed to 20 ppm ammonia, indicating the positive frequency shift was derived from the decrease in film conductance.

High frequency microfluidic performance of LiNbO3 and ZnO surface acoustic wave devices

Rayleigh surface acoustic wave (SAW) devices based on 128° YX LiNbO3 and ZnO/Si substrates with different resonant frequencies from ∼62 MHz to ∼275 MHz were fabricated and characterized. Effects of SAW frequency and power on microfluidic performance (including streaming, pumping, and jetting) were investigated. SAW excitation frequency influenced the SAW attenuation length and hence the acoustic energy absorbed by the liquid. At higher frequencies (e.g., above 100 MHz), the SAW dissipated into liquid decays more rapidly with much shorter decay lengths. Increasing the radio frequency (RF) frequencies of the devices resulted in an increased power threshold for streaming, pumping, and especially jetting, which is attributed to an increased absorption rate of acoustic wave energy. ZnO SAW devices could achieve similar streaming, pumping, and jetting effects as well as frequency effect, although the SAW signals are relatively weaker.

Sputtered ZnO film on aluminium foils for flexible ultrasonic transducers.

Nanocrystalline ZnO films with both C-axis vertical grown and inclined angled grown were sputter-deposited onto aluminium foils (50 μm thick) and characterised for using as flexible ultrasonic transducers. As-deposited C-axis grown ZnO films were annealed at different temperatures up to 600 °C to enhance film crystallinity and reduce film stress. The C-axis grown ZnO film on the Al foil were bonded onto steel plates, and the pulse-echo tests verified a good performance (with dominant longitudinal waves) of the ultrasonic transducers made from both as-deposited and post-annealed films. Inclined angled ZnO films on the Al foil glued onto steel plates generated mixed shear and longitudinal waves in the pulse-echo test.

Vertical jetting induced by shear horizontal leaky surface acoustic wave on 36° Y-X LiTaO3

Shear horizontal surface acoustic waves (SH-SAWs) have been regarded as good candidates for liquid sensing applications but are inefficient in fluid manipulation due to a minimal fluid coupling between the fluid and acoustic waves. However, in this letter, a vertical jetting function was realized using the SH-SAW generated from a 36° Y-X LiTaO3 SAW device. The jetting of the droplet induced by the SH-SAWs was observed nearly along the vertical direction, and the aspect ratio of the liquid beam is proportional to the applied power before breaking up, which is dramatically different from those generated from the conventional Rayleigh SAWs. By conducting theoretical simulation and experimental investigation on the SH-SAWs systematically, we concluded that the wave/energy pressure dissipated into the sessile droplets causes this vertical ejection on the device surface.

Ultraviolet sensing based on nanostructured ZnO/Si surface acoustic wave devices

An ultraviolet (UV) sensor based on nanostructured zinc oxide (ZnO)/Si surface acoustic wave (SAW) devices was studied in this paper. The ZnO films sputtered onto Si (100) substrate showed a preferred (0002) orientation and good photoluminescence emission. For an SAW device with a wavelength of 64 μm, a frequency downshift of ~1.4 kHz was observed for the Rayleigh mode under a UV light intensity of 0.6 mW cm−2, whereas the frequency downshift for the Rayleigh mode was increased to 8.3 kHz after integrating ZnO nanorods (NRs) in the ZnO/Si SAW devices. For the SAW device with a wavelength of 20 μm irradiated under a UV light intensity of 0.6 mW cm−2, a frequency downshift of 25 kHz for the Sezawa mode was obtained compared to a shift of 12 kHz for the Rayleigh mode. After depositing ZnO NRs, the resonant frequency for the Rayleigh mode was increased to 27.4 kHz under the same UV intensity illumination, due to the significant increase in surface-to-volume ratio.

Room-Temperature Ammonia Sensor Based on ZnO Nanorods Deposited on ST-Cut Quartz Surface Acoustic Wave Devices

Using a seed layer-free hydrothermal method, ZnO nanorods (NRs) were deposited on ST-cut quartz surface acoustic wave (SAW) devices for ammonia sensing at room temperature. For a comparison, a ZnO film layer with a thickness of 30 nm was also coated onto an ST-cut quartz SAW device using a sol-gel and spin-coating technique. The ammonia sensing results showed that the sensitivity, repeatability and stability of the ZnO NR-coated SAW device were superior to those of the ZnO film-coated SAW device due to the large surface-to-volume ratio of the ZnO NRs.