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Yuichi Fukushima

Shin-Etsu Chemical

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Publication

Featured researches published by Yuichi Fukushima.

Archive | 2010

Photomask blank and photomask

Hiroki Yoshikawa; Yukio Inazuki; Satoshi Okazaki; Takashi Haraguchi; Tadashi Saga; Yosuke Kojima; Kazuaki Chiba; Yuichi Fukushima

Archive | 2005

Photomask blank, photomask and fabrication method thereof

Hiroki Yoshikawa; Yukio Inazuki; Yoshinori Kinase; Satoshi Okazaki; Takashi Haraguchi; Masahide Iwakata; Yuichi Fukushima

Archive | 2007

Photomask blank and photomask making method

Hiroki Yoshikawa; Yukio Inazuki; Sathoshi Okazaki; Takashi Haraguchi; Tadashi Saga; Yosuke Kojima; Kazuaki Chiba; Yuichi Fukushima

Archive | 2005

Photomask blank, photomask and method for producing those

Hiroki Yoshikawa; Yukio Inazuki; Yoshinori Kinase; Satoshi Okazaki; Takashi Haraguchi; Masahide Iwakata; Mikio Takagi; Yuichi Fukushima; Tadashi Saga

Archive | 2005

Halftone phase shift mask blank, halftone phase shift mask, and pattern transfer method

Kimihiro Okada; Masahide Iwakata; Takashi Haraguchi; Mikio Takagi; Yuichi Fukushima; Hiroki Yoshikawa; Toshinobu Ishihara; Satoshi Okazaki; Yukio Inazuki; Tadashi Saga

Archive | 2004

Phase shift mask blank, phase shift mask, and pattern transfer method

Hiroki Yoshikawa; Yukio Inazuki; Satoshi Okazaki; Takashi Haraguchi; Yuichi Fukushima; Yoshihiro; Tadashi Saga

Archive | 2005

Film-depositing target and preparation of phase shift mask blank

Hiroki Yoshikawa; Toshinobu Ishihara; Satoshi Okazaki; Yukio Inazuki; Tadashi Saga; Kimihiro Okada; Masahide Iwakata; Takashi Haraguchi; Yuichi Fukushima

Archive | 2005

Halftone phase shifting mask blank, halftone phase shifting mask, and pattern transfer method

Hiroki c; o Shin-Etsu Chem. Co. Ltd. Yoshikawa; Toshinobu c; o Shin-Etsu Chem. Co. Ltd. Ishihara; Satoshi c; o Shin-Etsu Chem. Co. Ltd. Okazaki; Yukio c; o Shin-Etsu Chem. Co. Ltd. Inazuki; Tadashi Saga; Kimihiro Okada; Masahide Iwakata; Takashi Haraguchi; Mikio Takagi; Yuichi Fukushima

Archive | 2007

Method of making a photomask

Horiki Yoshikawa; Yukio Inazuki; Satoshi Okazaki; Takashi Haraguchi; Tadashi Saga; Yuichi Fukushima

Archive | 2005

Rohling für Halbton-Phasenschiebermaske, Halbton-Phasenschiebermaske, sowie Verfahren zum Übertragen eines Musters

Hiroki Yoshikawa; Toshinobu Ishihara; Satoshi Okazaki; Yukio Inazuki; Tadashi Saga; Kimihiro Okada; Masahide Iwakata; Takashi Haraguchi; Mikio Takagi; Yuichi Fukushima

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Collaboration

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Takashi Haraguchi

Shin-Etsu Chemical

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Tadashi Saga

Shin-Etsu Chemical

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Hiroki Yoshikawa

Shin-Etsu Chemical

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Satoshi Okazaki

Shin-Etsu Chemical

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Yukio Inazuki

East Tennessee State University

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Masahide Iwakata

Shin-Etsu Chemical

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Mikio Takagi

Shin-Etsu Chemical

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Kimihiro Okada

Shin-Etsu Chemical

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Toshinobu Ishihara

Shin-Etsu Chemical

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Yoshinori Kinase

Shin-Etsu Chemical

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