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Yuichi Shibazaki

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Publication

Featured researches published by Yuichi Shibazaki.

Archive | 2001

HOLDING DEVICE, OPTICAL ELEMENT HOLDING DEVICE, LENS BARREL, EXPOSURE DEVICE AND METHOD FOR MANUFACTURING MICRODEVICE

Yuichi Shibazaki; 祐一 柴崎

Archive | 2006

Mask, exposure device, exposure method, and method for manufacturing device

Yuichi Shibazaki; Hiroyuki Suzuki; 祐一 柴崎; 博之 鈴木

Archive | 2001

Optical element holding device, lens barrel, exposure device, and manufacturing method of microdevice

Yuichi Shibazaki; 祐一 柴崎

Archive | 2003

Optical apparatus, aligner, manufacturing method of device

Yuichi Shibazaki; 祐一 柴崎

Archive | 2007

Exposure method and device manufacturing method, and exposure apparatus

Yuichi Shibazaki; 祐一 柴崎

Archive | 2006

Member, method, and device for holding substrate, and device and method for exposure

Yuichi Shibazaki; 祐一 柴崎

Archive | 2005

Adjusting method and exposure apparatus

Masaru Arai; Yuichi Shibazaki; 祐一 柴崎; 大 荒井

Archive | 2001

OPTICAL ELEMENT HOLDING DEVICE, LENS BARREL, EXPOSURE DEVICE AND METHOD FOR MANUFACTURING DEVICE

Yuichi Shibazaki; 祐一 柴崎

Archive | 2008

Method and system for driving movable body, patterning method and device, exposure method and device, position control method and system, and method for manufacturing device

Yuho Kanatani; Yuichi Shibazaki; 祐一 柴崎; 有歩 金谷

Archive | 2005

Substrate holding device, aligner having the same, exposure method, method for producing device, and liquid repellent plate

Yuichi Shibazaki; 祐一 柴崎

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Hiroyuki Suzuki

Nippon Telegraph and Telephone

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