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Yuji Tobisaka

Shin-Etsu Chemical

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Publication

Featured researches published by Yuji Tobisaka.

Archive | 2009

Method for preparing substrate having monocrystalline film

Yoshihiro Kubota; Makoto Kawai; Kouichi Tanaka; Yuji Tobisaka; Shoji Akiyama; Yoshihiro Nojima

Archive | 2009

Process for producing soi wafer

Shoji Akiyama; Yoshihiro Kubota; Atsuo Ito; Kouichi Tanaka; Makoto Kawai; Yuji Tobisaka; Hiroshi Tamura

Archive | 2009

Method for producing soi substrate

Shoji Akiyama; Makoto Kawai; Atsuo Ito; Yoshihiro Kubota; Kouichi Tanaka; Yuji Tobisaka; Hiroshi Tamura

Archive | 2009

Method for manufacturing silicon thin film transfer insulating wafer

Shoji Akiyama; Yoshihiro Kubota; Atsuo Ito; Makoto Kawai; Kouichi Tanaka; Yuji Tobisaka; Yoshihiro Nojima

Archive | 2013

SOS SUBSTRATE HAVING LOW DEFECT DENSITY IN VICINITY OF INTERFACE

Shoji Akiyama; Atsuo Ito; Yuji Tobisaka; Makoto Kawai

Archive | 2013

Sos substrate having low surface defect density

Shoji Akiyama; Atsuo Ito; Yuji Tobisaka; Makoto Kawai

Archive | 2010

Method of manufacturing laminated wafer by high temperature laminating method

Shoji Akiyama; Yoshihiro Kubota; Atsuo Ito; Makoto Kawai; Kouichi Tanaka; Yuji Tobisaka; Yoshihiro Nojima

Archive | 2009

METHOD FOR PRODUCING SILICON FILM TRANSFERRED INSULATOR WAFTER

Shoji Akiyama; Yoshihiro Kubota; Atsuo Ito; Makoto Kawai; Kouichi Tanaka; Yuji Tobisaka; Yoshihiro Nojima

Archive | 2013

THERMALLY OXIDIZED HETEROGENEOUS COMPOSITE SUBSTRATE AND METHOD FOR MANUFACTURING SAME

Shoji Akiyama; Yuji Tobisaka; Kazutoshi Nagata

Archive | 2010

Method for producing bonded wafer

Makoto Kawai; Yuji Tobisaka; Shoji Akiyama

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Collaboration

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Makoto Kawai

Shin-Etsu Chemical

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Shoji Akiyama

Shin-Etsu Chemical

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Atsuo Ito

Shin-Etsu Chemical

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Yoshihiro Kubota

Shin-Etsu Chemical

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Kouichi Tanaka

Shin-Etsu Chemical

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Yoshihiro Nojima

Shin-Etsu Chemical

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Shoji Akiyama

Shin-Etsu Chemical

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Hiroshi Tamura

Shin-Etsu Chemical

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Kazutoshi Nagata

Shin-Etsu Chemical

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昌次 秋山

Shin-Etsu Chemical

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