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Yukio Hanamoto

Sumitomo Chemical

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Publication

Featured researches published by Yukio Hanamoto.

Archive | 1989

Positive resist composition containing quinone diazide sulfonic acid ester of a phenol compound and an alkali soluble resin

Yasunori Uetani; Makoto Hanabata; Hirotoshi Nakanishi; Koji Kuwana; Yukio Hanamoto; Fumio Oi

Archive | 2000

Method of manufacturing photoresist composition with reduced amount of fine particles

Yukio Hanamoto; Takeshi Hioki; Shigemi Maeda; 成実 前田; 毅 日置; 幸夫 花元

Archive | 2002

Method of producing photoresist

Takeshi Hioki; Kota Tokuhara; Yukio Hanamoto

Archive | 2004

Chemical amplification resist composition

Yukio Hanamoto; Kouji Kuwana; Satoshi Yamamoto

Archive | 1993

Resist composition, novel phenol compound and quinone diazide sulfonic acid ester of novel phenol compound

Yasunori Uetani; Makoto Hanabata; Hirotoshi Nakanishi; Koji Kuwana; Yukio Hanamoto; Fumio Oi; Jun Tomioka

Archive | 1989

Process for preparing a positive resist composition by mixing the condensation product of a quinone diazide sulfonyl halogenide and a phenol with a resin solution without isolating the condensation product from the crude mixture

Takeshi Hioki; Koji Kuwana; Jun Tomioka; Hirotoshi Nakanishi; Yasunori Uetani; Yukio Hanamoto; Fumio Oi

Archive | 1990

Composition for positive type resist

Makoto Hanabatake; Yukio Hanamoto; Yasunori Kamiya; Koji Kuwana; Hirotoshi Nakanishi; Sakuo Ooi

Archive | 2004

Method for evaluating solution for coating film for semiconductor

Yukio Hanamoto; Satoshi Yamamoto

Archive | 2004

Chemical amplification photo etching glue composition

Yukio Hanamoto; Kouji Kuwana; Satoshi Yamamoto

Archive | 1994

Process for producing resist composition

Yukio Hanamoto; Hiroshi Takagaki; Ayako Ida

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Collaboration

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Hirotoshi Nakanishi

Sumitomo Chemical

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Koji Kuwana

Sumitomo Chemical

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Fumio Oi

Sumitomo Chemical

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Yasunori Uetani

Sumitomo Chemical

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Satoshi Yamamoto

Sumitomo Chemical

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Takeshi Hioki

Sumitomo Chemical

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Jun Tomioka

Sumitomo Chemical

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Makoto Hanabata

Sumitomo Chemical

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Ayako Ida

Sumitomo Chemical

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Hiroshi Takagaki

Sumitomo Chemical

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